Visit the website of the following companies
2008 SVC Virtual Exhibit
Visit the website of the following companies
ALCATEL VACUUM PRODUCTS, INC.
ANGSTROM SCIENCES, INC.
APPLIED MATERIALS
BROOKS AUTOMATION, INC.
DARLY CUSTOM TECHNOLOGY, INC.
DEXTER MAGNETIC TECHNOLOGIES, INC.
DUNIWAY STOCKROOM CORPORATION
FIL-TECH, INC.
GENERAL PLASMA, INC.
INFICON
KBM CORPORATION
KDF
MATERIALS SCIENCE, INC.
MDC VACUUM PRODUCTS, LLC
MUSTANG VACUUM SYSTEMS, LLC
NILES ELECTRONICS, INC.
OERLIKON LEYBOLD VACUUM USA INC.
PLANSEE GMBH
PROVAC AG-RICMAR SALES & SERVICE
REACTIVE NANOTECHNOLOGIES, INC.
SAGE INDUSTRIAL SALES, INC.
SCALAR TECHNOLOGIES
SIDRABE, INC.
SIERRA APPLIED SCIENCES, INC.
SOLVIX SA
SUMITOMO (SHI) CRYOGENICS OF AMERICA, INC.
THERMAL CONDUCTIVE BONDING, INC.
TORR INTERNATIONAL, INC.
UC COMPONENTS, INC.
UMICORE THIN FILM PRODUCTS
VACUUM ENGINEERING & MATERIALS CO., INC.
VARIAN, INC.
VAT, INC.
VON ARDENNE
ZPULSER, LLC
4Wave Inc has expertise in ion beam and plasma processing systems, ion/electron/plasma sources, and in-situ process monitors for the etching and deposition of thin films. In addition to Ion Beam Etching (IBE) and Ion Beam Deposition Systems (IBD), 4Wave offers equipment solutions with the Biased Target Deposition (BTD) technique. BTD is uniquely suited to demanding nanotechnology advancements in optical, semiconductor and magnetic device industries. 4Wave offers standard and custom integrated thin film fabrication solutions, along with process development support through 4Wave’s in-house applications laboratory.
A&N Corporation (www.ancorp.com) provides system OEM’s and vacuum coaters a complete line of vacuum components from process chambers and custom valves to standard ISO, CF, and ASA flanges and fittings. A&N’s innovative products can help extend the period between maintenance cycles, reducing costly system downtime.
ACADEMY PRECISION MATERIALS Booth 420/421
Academy Precision Materials (APM) is now The Academy Group. As The Academy Group our experienced staff will continue to provide high quality environmentally-friendly sputter targets, evaporation materials and excellent service for which we are known. Contact us to learn how we are “the right element” for your company.
ADVANCED ENERGY INDUSTRIES, INC. Booth 206/208
Advanced Energy® is a global leader in innovative power and control technologies for high-growth, thin-film manufacturing and solar power generation. Specifically, AE targets semiconductors, solar cells, flat panel displays, data storage products, architectural glass, solar grid-tie inverters and other advanced applications. AE’s portfolio includes power systems; gas and liquid flow systems; thermal instruments; and global support services.
ADVANCED TECHNOLOGY & MATERIALS CO., LTD. Booth 1231/1233
AT&M is a worldwide professional manufacturer of sputtering target for a wide range of application fields, who owns large-scale CIP/HIP facilities, high temperature sintering furnaces, vacuum induction furnaces, large-scale vacuum rolling machines, modern machining shop and high accuracy chemical analysis instruments, etc. Its strict quality control system and reliable product quality enables AT&M to enjoy a high reputation all over the world.
ADVANCED VACUUM CO., INC. (ADVACO) Booth 413
ADVACO features remanufacturing services for all types of vacuum equipment including turbo pumps, dry pumps, mechanical pumps, cryo pumps, diffusion pumps, roots-type blowers, and helium leak detectors. All vacuum pumps rebuilt by ADVACO carry a one-year warranty from the date of installation.
ALCATEL VACUUM PRODUCTS, INC. Booth 1216
www.adixen-usa.com
Alcatel manufactures a complete range of AdixenTM brand products including dry vacuum pumps and dry pumping systems, rotary vane pumps, ceramic bearing turbomolecular pumps, full 5 axis maglev turbomolecular pumps, molecular drag pumps, vacuum valves, vacuum gauges as well as vacuum flanges/fittings. Alcatel specializes in helium and N2/H2 leak detectors.
ALICAT SCIENTIFIC, INC. Booth 412
Alicat Scientific, Inc. manufactures inexpensive yet versatile mass flow meters and controllers. The unique design utilizes laminar flow technology and differential pressure to measure mass flow, temperature and pressure. Multiple gas calibrations are standard. Ranges from .005 SCCM to 1500 SLPM with 10-100 ms response times. Typically shipping is within 10 days ARO.
Ametek Process Instruments featuring the Dycor line of mass spectrometers and the New Dycor System for Closed Loop Control of Reactive Sputtering Processes. This system controls gas flow such as oxygen, to maintain desired concentration levels important for consistent metal deposition, and improved target efficiency. Response time is under 100 milliseconds.
Anatech USA manufactures small to large PVD systems for University, R&D and production applications. The systems can be configured for RF/DC magnetron sputtering, electron beam gun, resistance heated sources and ion gun assist process. Anatech specializes in Custom design and serves a vast array of PVD customers that include the microelectronics, optical, nanotechnology, and aerospace industries.
ANGSTROM ENGINEERING INC. Booth 620
Angstrom Engineering Inc. manufactures PVD systems with advanced process capabilities for thin film applications involving thermal evaporation, sputtering, electron beam deposition and ion beam etching. Angstrom's modular product series offer unique configuration flexibility at a competitive price while providing unmatched value through innovative design expertise, exemplary customer support and quality workmanship.
ANGSTROM SCIENCES, INC. Booth 404/406
www.angstromsciences.com
Angstrom Sciences specializes in custom-designed magnetron sputtering cathodes. For 20 years, the company's patented profiled magnet technology and turbulent cooling have provided clients with improved target utilization and deposition rates without compromising thin film quality. The Onyx® Revolution provides up to 85% target utilization. Stop by booth 404/406 to discuss your application.
ANGSTROM SUN TECNOLOGIES, INC. Booth 401
Angstrom Sun Technologies Inc. manufactures advanced but affordable TFProbe series optical instruments for thin film applications: (1) Simple and easy to use thin film thickness measurement station (SR Series), (2) Microspectrophotometer and film thickness measurement system for MEMS and patterned wafer with a sampling region as small as 1 um (MSP Series), (3) Desktop Film Thickness Mapping system with capability to handle 300mm wafer (SRM Series), (4) Spectroscopic ellipsometer system, (5) In-Line, real time or integrated metrology solutions for EPD of film/coating thickness, (6) Software for thin film and digital imaging analysis, (7) Advanced analytical service for film thickness and optical constants.
APPLIED MATERIALS Booth 113/212
www.amat.com
Applied’s Energy & Environmental Solutions Group is dedicated to applying nanomanufacturing technology to solar, glass, web and other products to enable the cost-effective conservation of energy. Applied’s Glass Coating Products offers coating equipment for production of low-emissivity and solar control architectural glass. Web Coating Products supplies coating equipment for the vacuum roll-to-roll coating markets for applications such as flexible packaging, transparent conductive coatings, flexible printed circuit boards, solar cells and displays. The Solar Business Group offers integrated thin film production lines for manufacturing solar modules on large-area glass panels and wafering & deposition systems for crystalline silicon cell applications.
Atlas Technologies is a leader in aluminum vacuum chamber fabrication, Chambers for large area thin film solar-photovoltaic web coating and glass plate coating. We offer advanced proprietary aluminum chamber design, manufacturing processes, welding & surface finish and cleaning. Chambers can be O-ring sealed and/or use our metal sealed, CF flanges and ATCR gas feedthru fittings.
AUSTIN SCIENTIFIC, AN OXFORD INSTRUMENTS COMPANY Booth 1033
Austin Scientific, an Oxford Instruments Company, has been providing cryopumps, helium compressors and accessories to the research & development markets for almost 20 years. Now backed by the Oxford Instruments family of companies they are becoming the cryopump of choice for industrial applications. We support our customers using our products as well as cryopumps, cold heads and compressors from CTI and Leybold.
AVALUXE INTERNATIONAL GMBH Booth 1330
Avaluxe International GmbH - founded in 2004 by Christos Pernagidis and Peter Schiffl - is a specialized Service and Marketing Company. We are located in Nuremberg, with offices in Illinois and California. Today we have a team of 13 service-oriented individuals who have many years experience in the areas of special alloys and materials for the Coating industry.
BEKAERT ADVANCED COATINGS N.V. Booth 415/417
Bekaert works closely with its customers to upgrade from planar to cylindrical rotating technology and offers them an improved value creation model through longer production runs, faster coating deposition and a more complete use of coating material. Bekaert has built its experience in the sputtering technology field through its own plastic foil coating for window film and industrial applications. Industrial customers who execute a coating process for applications such as architectural and automotive glass, display glass and photovoltaic glass, can significantly benefit from adopting Bekaert's sputter solutions and technology.
BENEQ is a manufacturer of Atomic Layer Deposition (ALD) systems and proprietary nHALO(r) Liquid Flame Spray Technology for functional surfaces. Novel Thin Film Systems, TFS 200&500 are designed for advanced thin film processing, protective coatings, functional surface build up and doping purposes. Substrate alternatives include, wafers and other planar substrates, powders, porous and complex 3D substrates. Due to the versatile reaction chamber design (up to diam. 450 x 500mm), TFS 200&500 are optimum deposition tools for various ALD applications. www.beneq.com
BROOKS AUTOMATION, INC. Booth 1115/1117
www.brooks.com
Brooks Automation is a leader in vacuum components for sputtering and coating applications; and provides proven, reliable product configurations, application expertise, engineering services and operational capability to achieve system goals. CTI-Cryogenics® High Vacuum Pumps, Granville-Phillips® Measurement Solutions and Polycold® Cooling and Water Vapor Pumping solutions are used in the majority of coating applications across the world. Backed by GUTS® (Guaranteed Uptime Support) and worldwide service capability, Brooks' vacuum solutions stand the test of time under vigorous process conditions.
Brooks Instrument has led the industry in flow measurement and control for decades in numerous applications, from simple to complex. Brooks also has unique vaporization solutions. We have the only system robust enough for low vapor pressure fluids. Visit our booth to find out more.
BRUSH CERAMIC PRODUCTS Booth 1042
Brush Ceramic Products is the leading manufacturer of Beryllium OxideCeramics. BeO ceramics enables vapor deposition of aluminum as well as many other materials. BeO provides thermal conductivity at 325W/mK. The superior thermal shock characteristics make it an ideal choice for PVD components. Our materials come in standard or custom configurations.
CemeCon offers PVD sputter equipment and thin film solutions in one of the world’s largest coating centers. The CC800®/9 HPPMS coating system truly integrates the HPPMS technology and tested recipes into a ready to use research tool. The CC800®/9 SinOx with pulse technology targets the oxide area.
CERAMTEC NORTH AMERICA Booth 112
CeramTec North America is the world leader in ultrahigh vacuum seal technologies. CeramTec designs and manufactures ceramic-to-metal and glass-ceramic hermetic electrical & optical components. These Ceramaseal® products include: feedthroughs, connectors, thermocouples, viewports, isolators and accessories. Products include both standard and CUSTOM designs for use in vacuum, ultrahigh vacuum, high-pressure, cryogenic, and high-temperature applications.
CETR is a world leading manufacturer of nano, micro and macro precision mechanical testers for coatings, thin films and bulk materials, with measurements of adhesion, delamination, scratch-resistance, nano- and micro- hardness, elastic modulus, friction, reciprocating and rotary wear, fatigue, elasticity, plasticity and other mechanical properties, including in controlled temperature (-25C to +1,000C), humidity or vacuum, for biomedical, microelectronics, data storage and other industries, as well as for basic materials research on nano and micro levels.
CHA Industries has been manufacturing physical vapor deposition systems and components for more than 40 years. Offering a wide range of system configurations incorporating Sputtering, Electron Beam, Thermal and Ion Beam techniques, CHA Industries’ capabilities extend from full production to R & D. Flexibility in design allows CHA Industries’ new line of Roll/Web Coaters to address today’s expanding requirements.
CHENGDU ULTRA PURE APPLIED MATERIALS CO., LTD. Booth 409
Chengdu Ultra Pure Applied Materials Co., LTD (UPAM) is the leading Laser/Infrared/ DLC thin film coating company and a major manufacturer of Sputtering Targets, Evaporation Materials, Vacuum Chambers and Optical Elements in China. UPAM supplies the films and Si/Ge polishing chips to customers throughout the world. Our targets and evaporation materials are used by leading optical and semiconductor manufacturers. UPAM always insists on supplying high quality products and guarantees this quality with a very strict inspection program that utilizes the best equipment. UPAM welcomes technical inquiries at any time.
COASTAL INSTRUMENTS, INC. Booth 615
Coastal Instruments, Inc., specializes in service mass flow controllers, pressure transducers and sales (reconditioned devices.) Since 1980, Coastal is dedicated to developing long term partnerships with customers throughout the world. Our technology, reliability, integrity, and multiple locations have made us a recognized leader in the calibration of flow and pressure measurement devices. ISO/IEC-17025 A2LA
COATING MATERIALS, DIVISION OF TICO TITANIUM, CO. Booth 517
Coating Materials, a Division of Tico Titanium, Inc. is a worldwide industry leader in supplying materials to the vacuum deposition industry, including Large Area Coating, Decorative Coating, Tool Coating, Electronics, Automotive Coatings, plus specialized industries, offering the following materials: aluminum, bronze, chromium, copper, hafnium, molybdenum, nickel, niobium, silver, stainless steel, tantalum, tin, titanium, tungsten, zinc and zirconium targets.
CSM INSTRUMENTS, INC. Booth 408
CSM Instruments offers a wide range of instruments and testing services for surface mechanical properties characterization, including: Hardness Testers, Scratch Testers, and Tribometers of varying load ranges. We manufacture testing modules that can be configured alone or combined together on a testing platform for a single instrument capable of multiple analysis modes.
Cyber Materials develops advanced process control technologies that reduce variation, improve capabilities, raise yields, and increase productivity of e-beam deposition processes. CM's products include: TrueGain: an automatic system for QCM controller tuning, E-Monitor: a process monitor that detects drift, and HotSpot: a vision system to optimize sweep patterns.
DARK FIELD TECHNOLOGIES, INC. Booth 309
Dark Field Technologies provides high-resolution laser scanning and camera vision systems for 100% on-line, real-time, automatic inspection of PV media (CdTe coatings on glass and other coatings and media including metal, film and silicon). Dark Field has the only proven laser and camera systems for low-e glass in the world, with multiple systems operating in the US. Additional capabilities include the inspection of display materials, sheets, or continuous webs for visual defects. Special systems for raw and coated glass/substrate inspection deliver detection levels of 10 microns and less. New laser-camera retro-reflective systems, laser-based defect imaging and AI-based defect classification systems have been developed and implemented. Optical quality, polarization shifts, and other optical effects can be detected with the system.
DARLY CUSTOM TECHNOLOGY, INC. Booth 1128
www.darlytech.com
Darly is a worldwide manufacturer of vacuum web and batch coating systems for the converting, electronics, optical, mobile phone and automotive industries. Coating options include thermal evaporation, sputtering, electron beam, plasma enhanced, ion assisted with multi-layer coatings in one pass, or reversible web direction for multi-layer coatings without breaking vacuum.
DENTON VACUUM, LLC Booth 1100/1101
Denton Vacuum is celebrating 40+ years as a leading supplier of thin film deposition equipment and processes. The company offers a range of deposition platforms for Sputtering, PVD, and PECVD. Denton also offers sample preparation equipment for microscopy and ion sources for ion-assisted deposition. Systems include the Explorer®, Discovery®, Integrity®, Voyager® PECVD and the new HDG Ion Beam Processing System.
DEXTER MAGNETIC TECHNOLOGIES, INC. Booth 1220
www.dextermag.com
Dexter Magnetic Technologies is a global provider of magnetic solutions. DMT serves the vacuum coating market with solutions based upon both permanent and electromagnetic technology. Our highly experienced engineers work with advanced technologies and provide magnetic solutions for a variety of applications such as: sputtering, wafer positioning, pumps, magnetic torque couplings, and plasma control.
DHF TECHNICAL PRODUCTS Booth 1319
DHF Technical Products (DHF) is the PRECIOUS METALS SPECIALISTS for the thin film industry - Platinum, Palladium, Silver, Gold and alloys involving precious metals. We are a primary manufacturer and refiner of precious metal targets. Exclusive to DHF is our "Target Exchange" program, offering you the best value for precious metals targets when you return spent targets to us for reclaim. Headquartered in Los Angeles for 35 years, we also have offices in New Mexico and New Hampshire. TARGETS, BONDING, BACKING PLATES AND REFINING / RECLAIM...from DHF Technical Products.
DUNIWAY STOCKROOM CORPORATION Booth 1122
www.duniway.com
Duniway Stockroom specializes in vacuum equipment and supplies; ion pumps and controls; flanges, gaskets, bolts and nuts; vacuum gauges and controls; mechanical pumps and rebuild kits; supplies (oils, greases, hoses, bell jars); diffusion pumps; and leak detectors. Equipment rebuilding services and a variety of reconditioned equipment are also available. Get a free catalog on our web site: www.duniway.com
DynaVac manufactures high vacuum systems for optical coating, thermal evaporation, and sputtering applications. Custom-engineered solutions are offered for unique process and production requirements, i.e. large area, inline, and web-handling deposition. Systems are fully automated and well suited for production environments. Full service installation and technical support is provided.
EB Sources is setting a New Standard with Ease of Maintenance that really describes our multi-pocket sources. You can remove all the copper components for cleaning without taking the source out of the chamber. Call us for E-guns, Feedthroughs or E-Gun repairs. Great Customer Service is our #1 product"
EBARA TECHNOLOGIES, INC. Booth 1329
EBARA Technologies Inc. is a global innovator/local provider of vacuum pumps and advanced semiconductor solutions. EBARA's products are backed by a superior global service and rebuild network. EBARA continues to expand its role by bringing to the market new, high quality, products: Dry Vacuum Pumps, Turbo Molecular Pumps, and Point-of-Use Abatement.
Edwards is a world leader in vacuum products for many manufacturing industries and offers a single source of technological expertise, innovative products, first-class service, and customized systems for various processes while maximizing value for the customer. Principal products include oil-free pumps, rotary piston pumps, liquid ring pumps, and boosters.
ESI Group, a world leading provider of simulation software and services to the semiconductor and materials industries, will feature CFD-ACE+, an extensive multi-physics CFD engineering design tool to exceed the most challenging requirements for simulating the physics of PVD processing, covering fluids, plasma, temperature and pressure for deposition and etching.
Evatec has acquired the Box Coater business from Unaxis (formerly Balzers) and is dedicated to advancing the development and production of the BAK/BAP line of deposition systems. Evatec will be displaying information on the BAK EVO, Samson source isolated evaporation system and the BAP 800 Ion Plating evaporation system.
Exotech specializes in reclaiming/recycling sputter target and production scrap, serving the sputtering industry for over 17 years. Exotech's Recycling Division uses unique processing capabilities to provide the highest monetary return on used targets and other sources of scrap. We recycle Chromium, Tantalum, Molybdenum, Tungsten, Niobium, Indium/ITO, Titanium, Nickel, Cobalt, Silicon, Ruthenium etc. and provide debonding services on request. Long known as producers of high purity Chromium and Titanium powders, we also stock a wide variety of refractory and exotic metals for melt applications.
FERROTEC (USA) CORPORATION Booth 505
Ferrotec (USA) Corporation offers a wide range of products for the vacuum coating industry. These products include standard and custom designed genuine Ferrofluidic vacuum rotary feedthroughs, motorized versions of our vacuum seals, electro-mechanical sealing subsystems, and electron beam evaporation equipment. Ferrotec also supplies thermoelectric modules/controllers and fabricated quartz hardware.
FIL-TECH, INC. Booth 313
www.filtech.com
Fil-Tech, Inc.’s New Catalog & New Products! Fil-Tech offers Longer Life Gold Crystals™. Fil-Tech is the leading supplier of Quality Crystals™ in Gold, Longer Life Gold, Silver and Alloy, sensor heads and hardware, Temescal Telemark electron beam gun replacement parts, Vecco Commonwealth Ion Tech ion source parts, liners, FT704 and DC704 silicones, Krytox, ionization, thermocouple and convection gauges. Fil-Tech introduces Liquid Plating Crystals. www.filtech.com
Measure thin films from 30 Angstroms to 450 microns with Filmetrics spectral reflectance based systems. Filmetrics features a complete line of affordable UV to NIR spectrometer systems for measuring thickness, optical constants, and deposition rates of thin films. Single-spot and mapping systems available. Contact Michael Klayman (klayman@filmetrics.com) or Tram Dang (tdang@filmetrics.com).
The Fraunhofer Institutes FEP (www.fep.fraunhofer.de) and IST (www.ist.fraunhofer.de) offer approved solutions for surface and coating technology using low-pressure-based plasma and atmospheric deposition processes as well as low energy electrons. Services include tailored thin film systems and surface analysis e.g. for scratch-resistant coatings or solar applications.
Since 1998 CCL offers contract R&D services in advanced coating technologies. We support customers to develop new products with unique surface properties for automotive, electronics, biomedical, and other markets. Resources include comprehensive PVD/CVD technologies and high performance coating materials. Our service is certified according to the ISO9001-2000 industrial quality standard.
GALILEO VACUUM SYSTEMS, INC. Booth 516
Galileo Vacuum Systems is a leading supplier of web vacuum coaters and slitter-rewinders serving the metallizing industry as well as the specialty roll coating market. Galileo’s product range spans from high-speed wide web metallizers for flexible packaging to modular multi-process web coaters for value-added products. Our Flexomet® pattern metallizing technology is used for high visual impact packaging, security products and flexible electronics.
Gencoa manufacture process optimized magnetron sputter cathodes that are unequalled in variety and performance and have a ‘money back’ target use guarantee of 45% for High Yield type magnetics. Also, shown in Chicago will be the Speedflo reactive gas controller and plasma process monitoring system. This can be supplied with cathodes / gas bars as an integrated package or retro-fitted to existing sputter machines for both planar and rotatable magnetron geometries.
GENERAL PLASMA, INC. Booth 1132/1134
www.generalplasma.com
General Plasma is an equipment manufacturing company specializing in advanced, production-ready vacuum thin-film deposition and etching equipment. General Plasma has developed a full set of process ready PE-CVD, PVD, and etch tools including linear high density plasma sources, rotatable magnetron sputter cathodes, moving magnet planar magnetrons and anode layer ion sources, and has applied these patented tools to enable high quality, high rate, cost effective silicon-based processing (Si3N4, SiO2, amorphous and micro-crystalline silicon) for photovoltaic applications.
GENERAL VACUUM EQUIPMENT, LTD. Booth 1105
General Vacuum, part of the Bobst Group business area Flexible Materials, is a premier supplier of vacuum web coating and metallizing solutions. Its product range covers Roll to Roll Vacuum deposition by resistive evaporation, electron beam evaporation, sputtering, and PECVD. Typical applications include Flexible packaging, Optical and Solar Coatings.
GFE MATERIALS TECHNOLOGY, INC. Booth 1208
GfE Coating Materials is one of the world's leading manufacturers of PVD coating materials for architectural glass, web, solar, photovoltaic, optics, wear resistance, tribological and decorative applications. GfE Coating Materials is headquartered in Nuremberg, Germany. Subsidiaries are in Wayne, PA - USA and Shanghai, China.
GNB Corporation is a manufacturer of high and ultrahigh vacuum valves, chambers, baffles, and liquid nitrogen traps. GNB is the leading US manufacturer of large gate valves. Product line includes: gate valves, pendulum valves, throttling valves, angle valves, water-cooled valves, vacuum chambers, baffles, traps, viewports, throttle plates, and fittings.
HAUZER TECHNO COATING BV Booth 320
Hauzer Techno Coating BV supplies PVD and PACVD coating technology and dedicated production equipment. The product portfolio consists of a large variety of machines for efficient mass production of decorative thin films for decorative applications and tribological and functional thin films for the tool and component market. Continuous development of the processes and equipment makes Hauzer a strong partner for current and future needs in surface engineering and modification.
HeatWave Labs specializes in the vacuum tube and vacuum equipment industries. Our expertise includes thermionic cathodes and ion emitters and guns, Ion Sources and ionizers, Ion pumps and controllers, vacuum tube design, processing, specialized refractory materials, UHV sample heating and filament products, temperature controllers and related products.
HERAEUS INCORPORATED Booth 1116
The Thin Film Materials Division (TMD) of W.C. Heraeus is first in development, production, sales and distribution of sputtering targets and evaporation materials for thin film technology world wide. Our wide range of products and services encompass the large area coating, photovoltaics, electronic components, displays and data storage markets. Reliable and high- quality products, excellent customer service and innovation make Heraeus the right choice for targets.
HIS VACUUM COMPONENTS Booth 1309
Since its inception in 1979, HIS has developed into an internationally recognized manufacturer of high quality vacuum components, fittings and valves. We are pleased to supply the vacuum coating industry with our products. Our commitment to customer service includes: Large inventory, Competitive pricing, In-house manufacturing, Quick turnaround and Superior surface finishes.
HORIBA JOBIN YVON, INC. Booth 1108
HORIBA Jobin Yvon offers a wide range of Spectroscopic Ellipsometers used for the characterization of multi-layer film thickness, optical constants, and materials composition of any type of materials. HJY also provides In-Situ End Point Detectors based on Optical Emission Spectroscopy or Laser Interferometry for Real Time plasma analysis and trench depth monitoring of dry etch and deposition processes (wwwjobinyvon.com).
HUETTINGER ELECTRONIC, INC. Booth 321
HUETTINGER Electronic Inc. manufactures power supplies for a variety of vacuum coating applications, such as reactive and metallic sputtering, evaporation and plasma treating. Products include DC and medium-frequency power supplies from 1 kW to 300 kW and RF power supplies from 300 W to 50 kW. HUETTINGER now offers their Series HMP for high impulse power magnetron sputtering (HIMPIMS) and their Series MP-II, a cost effective alternative to pulsed DC power supplies.
HULLVAC PUMP CORPORATION Booth 1321
Original Equipment Manufacturers (OEMs) and vacuum pump users rely on HullVac Pump Corporation to deliver lower cost OEM pumps and systems backed by a solid 3 year warranty, faster retrofit packages that fit where outdated OEM supplied vacuum systems sit, and immediate shipment of Stokes 412 and 212 replacement parts. We strive to deliver quality pumps and repair service with exceptional after sales support.
HUNTINGTON MECHANICAL LABORATORIES, INC. Booth 504
Huntington offers the industry's largest selection of vacuum research products: manual and pneumatic vacuum valves, feedthroughs, positioning devices, manipulators, flanges, fittings and roughing components. The modular designed positioning devices offer flexibility in choosing between manual, pneumatic and motorized versions. Electrical feedthroughs are available as Multipin, Power, Coaxial, RF Power, & TC. Custom designed chambers, manifolds, crosses and tees are supported by 35 years of experience in the vacuum industry. Customers take full advantage of in-house electropolishing and a clean room for assembly and testing. NEW products offered include Mini Ion Pumps, Vacuum Suitcases, and Custom Pulse Laser Deposition (PLD) Systems.
HVA, LLC is a premier manufacturer of high and UHV vacuum valves for the semiconductor, scientific, and high-technology industries. Product line includes stainless-steel gate valves, 3-position valves, angle valves, complete throttle/isolation gate valve systems, stainless-steel/aluminum rectangular valves, pendulum valves, new rapid service slit valves for easy maintenance, and more."
ICO SURFACE COATINGS Booth 1311
ICO Surface Coatings offers a full range of high performance PVD coatings for tooling and wear applications. Our advanced coatings give you performance properties you’re looking for longer life, higher hardness, less edge build-up, greater lubricity.
IfU GmbH is specialized in manufacture of custom specific spectroscopic and electronic measuring equipment. Application fields are diagnostics, development and control of plasma processes like MF-driven reactive magnetron sputtering or pulsed microwave plasma applications. Visit our booth to learn more about time resolved spectroscopy and high-resolution imaging OES"
ILLINOIS INSTRUMENTS, INC. Booth 1313
Illinois Instruments manufacturers Oxygen, Moisture and CO2 process Analyzers; Oxygen CO2 and combined headspace analyzers for Modified Atmosphere Packaging (MAP); in addition to analyzers for the measurement of Oxygen Transmission Rate (OTR) and Water Vapor Transmission Rate (WVTR) for Films, Packages and Bottles with response time and through-put superior to an other alternate supplier.
Impedans Ltd. is a leading provider of plasma diagnostics instrumentation for use in research and industry. Our systems measure key parameters in the plasma and at the substrate surface which help users gain invaluable insight into their plasma based process. Our product offerings have applications in etch, PECVD, and sputtering processes, among others.
For thin film solar cells, semiconductor and data storage industries, In Silicio's Simulation Software enables: vacuum processes and equipment simulations for gas flow optimization, process uniformity improvement, accelerated and better magnetron design with predictive 3D modeling. We can help you solve today your most critical process and equipment engineering issues.
Indium Corporation is a premiere materials supplier to the global solar photovoltaic, electronics assembly, semiconductor fabrication and packaging, and thermal management markets. Founded in 1934, the company offers a broad range of products, services, and technical support focused on advanced materials science. Factories are located in the PRC, Singapore, the United Kingdom, and the USA.
INFICON Booth 207/209
www.inficon.com
INFICON offers gas analysis, measurement, and advanced process control through residual gas analyzers (mass spectrometers), particle detectors, helium leak detectors, multi-gas leak detectors, thin film deposition controllers and monitors, RF sensors, and sensor integration and analysis software. Pressure measurement products include vacuum gauges for total pressure measurement, valves, fittings and feedthroughs. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex fabrication of semiconductors and thin film coatings for flat panel displays, solar cells, magnetic and optical storage media, scientific and consumer optics, and architectural glass coatings.
INLAND VACUUM INDUSTRIES, INC. Booth 515
Inland Vacuum Industries manufactures and distributes a complete line of vacuum fluids and lubricants for the vacuum and related coating industries. We are an authorized Dow Corning, Santovac, Apiezon, Neovac, Fomblin / Galden and Halovac stocking distributor, along with a line of preventative maintenance products. In addition, we also offer the Midel biodegradable dielectric insulating fluid, high vacuum greases and waxes, fluids reclamation services and custom distillation. Inland Vacuum also has a complete line of NSF and USDA approval lubricants.
InstruTech’s core technologies are Convection and Ionization vacuum gauges, utilizing the most recent advances in vacuum gauge sensor and controller design. New product releases include: 1) The IGM-402: The first ever Modular Miniature Ionization Vacuum Gauge with Dual Convection. 2) The BRAX-3000: Rack mount Ionization gauge Controller with Dual Convection.
INSULATOR SEAL, INC. Booth 1217
Insulator Seal, Inc. offers a complete line of thermocouple feedthroughs, single and double-ended multi-pin instrumentation feedthroughs, an extensive selection of industry standard coaxial instrumentation and power feedthroughs, high-frequency RF power feedthroughs with patented cooling geometry and electrical breaks suitable for cryogenic service. Additional products include, EUV-grade viewports, high-current Powerboot®-fitted feedthroughs, and Type D-and Type C subminiature connectors.
Intlvac manufactures a variety of standard systems for Physical Vapor Deposition such as the Nanochrome™ and Nanoquest line of machines suitable for R&D and production coating of optical components, sensors, and plastics. The Nanochrome™ series are Electron Beam or Magnetron Sputter Thin Film Deposition Systems. The Nanoquest series are Ion Beam Sputtering and Etch systems. Systems are fully automated, running under a LabVIEW Interface with PLC control. Intlvac can also provide process development support for magnetron sputtering. Ion Beam sputter/etch and ion assisted evaporation from our in-house development laboratory.
INTEGRATED MANUFACTURING GROUP, LLC Booth 1240
The Integrated Manufacturing Group has performed Precision Machining and Fabrication for the Vacuum Industry since 1947, originally has Niles Machine & Tool Works. IMG manufactures critical small parts to very large parts, vacuum chambers, precision weldments and electromechanical assemblies. IMG serves OEM’s in the solar, semiconductor, energy exploration and generation, aerospace and other equipment industries. IMG strives to be the most collaborative and highest quality consulting and production to its customers, worldwide
Intellevation manufactures a range of optical monitors for automatically controlling film thickness during the growth of high precision optics. Fully integrated and fully automated hardware and software solutions are installed onto your coating systems by our engineers to enable you to achieve the highest standards in performance and capability.
IonBond, LLC is an international provider of high quality thin-film PVD, PaCVD and CVD coating technologies. We offer state of-the-art coating service worldwide and manufacture customer specific coating equipment. Our offer ranges from coating contracts and technical analysis for individual products to shop-in-shop coating centers up to the sale of customer specific coating equipment.
J.A. WOOLLAM CO., INC. Booth 311
J.A. Woollam Co., Inc., provides spectroscopic ellipsometers for thin film characterization, including multilayer thicknesses, optical constants (n and k), in situ process monitoring and control, and more. New instruments extend the wavelength range to both vacuum ultraviolet and infrared (140 nm - 33 microns). Both research-grade and high-speed metrology tools for process monitoring are offered.
KASHIYAMA USA, Inc. Booth 1235
Kashiyama is the best dry screw pump innovator who can provide wide range of the most durable, reliable and toughest dry pumps through out the semiconductor and FPD market. Over 20 years of extensive knowledge and experience in vacuum pump business to develop and supply high quality equipment tailored to customers' requirements has contributed a huge role in high-tech industries.
KAUFMAN & ROBINSON, INC. Booth 1229
Kaufman & Robinson offers its portfolio of commercial ion/plasma sources and power supply controllers. Our products are used in thousands of worldwide installations. Our innovative designs and manufacturing standards result in high quality and productive plasma tools needed in critical deposition and etching processes, including ion assisted deposition, plasma etching & ion beam sputtering.
KBM CORPORATION Booth 508
www.kbmcorp.co.kr
KBM Corporation is a leading manufacturer of vacuum coating materials such as aluminum and tin products, heating sources, of tungsten, molybdenum, tantalum in the form of evaporation filaments, boats, plasma sources, rod, wires, and sheets as well as electron and ion beam filaments. Sources and materials are applicable for precision optics, ophthalmic, reflection and protection, web, display and R&D applications.
KDF Booth 521
www.kdf.com
KDF produces in-line-sputtering tools for the mainstream silicon, emerging materials, and flat-panel display markets. KDF is extending its product portfolio to include four-cathode capability - The 654ix and the 954ix. KDF now offers large area 744i & 844i coating systems for Flat Panel Displays, solar cell and UBM wafer production.
Kolzer manufactures and supplies vacuum treatment plants. Kolzer was founded in 1950 and was one of the pioneers in early vacuum technology. Following on half century of experience, today Kolzer is a market leader in the high-vacuum treatment field with over 1000 units currently operating worldwide. KOLZER produces a complete range of machinery, offering different types of processes: Sputtering, Plasma, Metallization, and PE-CVD.
KOREA VAC-TEC CO., LTD. Booth 1140
KOREA VAC-TEC CO, LTD., was established in 1987. Since that time, VAC-TEC produced different types of vacuum equipment of optical coating systems for precise optics, ophthalmic lenses, halogen lamps, and sputtering systems for different applications. Vacuum machines, produced by KOREA VAC-TEC, are installed in many countries in Europe, Asia, Africa, and the USA. Our business politics is a development of its own facilities based on originally designed vacuum and in-line systems, plasma, and ion beam technologies.
Kurdex offers: Thin Film Deposition and Etch Systems for High Volume Production, Pilot Production and R&D. Products include: Sputtering, Evaporation, RIE, PECVD, PR Strip, Magnetic Data Storage (HDD), Arc-Plasma Coater, high Volume Substrate Handling (Automation & Robotics). Systems in the following Platforms: In-Line, Cluster, Box Coater, and hard Disk Coater. Substrate sizes from Batch of small Substrates to Single large Substrate up to 900 x 2300mm. Applications: Flat Panel Display (TFT, OLED), Semiconductor, High Density Interconnect, Magnetic Data Storage (HDD-95mm @ 1800/hr.) Wafers up to 300mm, Glass, and Plastic Coating (ITO, AR), Solar Cell.
KURT J. LESKER COMPANY Booth 1133/1232
The Process Equipment Division of KJLC® offers advanced vacuum coating solutions and serves many applications. Featuring our new, state-of-the-art, Performance Magnetrons and vacuum deposition systems. Our Materials Group supplies a large variety of Lesker brand sputter targets, evaporation materials and the remarkable new NanoBonding technology. For all your vacuum needs visit: www.lesker.com
KYKY TECHNOLOGY DEVELOPMENT LTD. Booth 1142
For 46 years, KYKY Technology Development Ltd. (KYKY) has focused on scientific instrument research, development, manufacturing and marketing. Products include vacuum instrument & equipment; analytical and medical instruments (Turbo Molecular pumps, Gate valves, Ion pumps, Helium Leak Detectors); Multifunction Magnetic Sputter Metallizer; Digital SEM, X-ray Energy spectrometer, Quadruple Gas Mass Spectrometer; Cooling Circulator Radio-frequency Electron Surgical Unit, 13CUBT mass Spectrometer. These products are applied in R&D institutes, universities, aeronautics, environment-protection etc, and are sold worldwide with solid reputation.
LayTec is the leader in the field of in situ sensors for MOCVD thin-film growth. Now the application range of LayTec's monitoring systems has been enhanced to amorphous and organic thin-film growth processes (sputter deposition, VTE, OVPD). The sensors measure the growth rate, layer thickness, substrate temperature and strain-induced substrate bowing.
Leybold Optics is a leading manufacturer of vacuum coating systems and developer of processes for the thin film technologies. The main focus of the processing technologies is on evaporation, sputtering and plasma-assisted coating processes for precision optics, ophthalmic, automotive, web, solar, display and R&D applications.
MATERIALS SCIENCE INTERNATIONAL, INC. Booth 1106
Materials Science International, Inc., (an ISO 9001-2000 Certified Company) has established an award-winning reputation for its expertise in the development and manufacture of high purity sputtering materials. These materials are used in a variety of critical thin film coating applications in the glass, solar power, electronic, and hardware industries.
MATERIALS SCIENCE, INC. Booth 510
www.msi-pse.com
SunSource GEN II magnetron sputtering sources include unique features like the Kam-Lok™ (patent pending) fast target change mechanism that eliminates target fasteners and gas injection through the cathode body. A wide uniform target erosion area results in stable reactive sputtering, high utilization and virtually no material re-deposition.
MDC VACUUM PRODUCTS, LLC Booth 1215
www.mdcvacuum.com
MDC produces state-of-the-art thin film vacuum coating equipment, and offers a wide range of choices and options in both, standard off-the-shelf components and customize designs. MDC's e-Vap® and Re-Vap™ product lines fully support electron beam or thermal evaporation methods. Featured products include the super economical and compact, 4 pocket, 3kw, e-Vap® Mighty Source™, electron beam deposition device. Specifically tailored for pilot production, Lab, University and R&D applications, the Mighty Source™ provides the ideal deposition solution for your evaporation needs.
MeiVac, Inc. has provided quality vacuum products for over 30 years. Our VQ Throttle Valve provides either upstream or downstream pressure control capabilities. We also offer a full line of MAK magnetron sputter sources, RF or DC magnetron power supplies, and substrate heaters. Sputter sources and valves will be on display.
MELEC GmbH develops and manufactures DC-pulsed power controllers for a wide range of pulse plasma treatment applications, particularly for HPPMS – High Pulse Power Magnetron Sputtering. New horizons will be opened through MELEC´s Superimposed Pulse Power Technology.
METALLURGICAL HIGH VACUUM CORPORATION Booth 700/701
Metallurgical High Vacuum Corporation, founded in 1981, is a manufacturer of Rotary Piston pumps up to 430 CFM and sells all types of vacuum pumps, both new and remanufactured. We offer expert remanufacturing service on most brands of pumps and blowers. Custom engineered valves, piping, and manifolds can be produced to you specification. Need help? Call us for professional help with all you vacuum needs. Factory trained engineers and technicians will gladly help you!
MICRO PHOTONICS INC. Booth 1107
Micro Photonics is a leading provider of advanced instrumentation. MPI’s extensive portfolio includes instruments for: wear and friction testing, nano/micro indentation and scratch testing, non-contact 3D profiling, and micro tomography. Application experience ranges from thin film to life sciences, biological research to automotive and space applications, semiconductor to coating technologies.
MIDWEST TUNGSTEN SERVICE, INC. Booth 1316
Midwest Tungsten supplies tungsten, molybdenum and tantalum products including electron and ion beam filaments, evaporation filaments and boats, plasma sources, machined parts, wire, sheet, and rod. We manufacture beam formers, e-gun parts, vacuum furnace shields and elements, supply Dow Corning diffusion oil, and recycle tungsten, molybdenum and tantalum scrap.
MILL LANE ENGINEERING CO., INC. Booth 604
Now in its 51st year of continual operation, Mill Lane Engineering now focuses on manufacturing PVD systems for the solar market. We now proudly offer metal, oxide and CIGS system in both flexible Web and In-Line glass deposition systems. The Web coaters are high throughput, multi-zoned and small foot. The CIGS system utilizes Veeco’s revolutionary CIGS source with high deposition rates and long life as well as superior uniformity across the substrates. Now with global sales and support, Mill Lane Engineering is positioned to manufacture, deliver and support the evolving demands of solar production.
MILLBROOK INSTRUMENTS, LTD. Booth 1308
Millbrook Instruments Ltd manufacturers a unique range of tabletop surface and interface chemical characterisation tools ideally suited to the analysis of thin films and thin film stacks. Nanoscale depth resolution and the high sensitivity of SIMS combined with both organic and inorganic analysis make this tool invaluable in the lab.
MKS INSTRUMENTS, INC. Booth 1127
MKS Instruments is a leading worldwide provider of instruments and subsystems used for measurement, control, powering, and monitoring of critical parameters in vacuum and gas-based manufacturing environments within the advanced thin film coating industries. Products include capacitance manometers and pressure transducers; pressure control valves; vacuum gauges; vacuum components and valves; mass flow controllers; gas analysis instruments; portable helium leak detectors; RF/microwave/DC power generators; digital control network devices including I/O modules and serial gateways; and pressure and gas flow portable calibration systems.
MORGAN ADVANCED CERAMICS - DIAMONEX PRODUCTS Booth 1111
Morgan Advanced Ceramics, Diamonex Products Division, offers a portfolio of Ion Beam and RF Plasma processing equipment including the Diamonex® CD Source™ and custom deposition systems as well as polycrystalline diamond, DLC and related coatings and services to optics, semiconductor, automotive, medical, and aerospace customers worldwide.
MPT Industries' OC Three/Five/Seven products are chemically inert lubricant-paste-sealant materials used when handling corrosive/oxidizing substances. From valve, manifold, pipeline, and regulator connections/fittings to high vacuum O-rings, these BAM certified products are solutions for critical and demanding applications where service failure is not an option.
MTS NANO INSTRUMENTS Booth 1324/1326
MTS Nano Instruments designs, engineers and manufactures instrumentation and software used to determine mechanical behavior of nano-scale materials and structures. Stop by our booth to experience a demonstration of the new Nano Indenter G200 system for characterization of thin films and vacuum coatings.
MUSTANG VACUUM SYSTEMS, LLC Booth 1110/1112
www.mustangvac.com
Mustang Vacuum Systems produces outstanding Sputtering equipment, PECVD metallizers, Roll-to-roll (web) coaters, and "Plug and Play" Optical coating systems. Celebrated for its quality, value and reliability, The Colt 48® small batch fast-cycle dual-door sputtering machine imparts a brilliant high-quality coating and an environmentally friendly topcoat, processed in a single chamber.
Myers Vacuum manufactures a range of vacuum gauges and rugged sensors. Featuring the new GT-430 digital thermistor gauge with Trend Sensing™. It displays pressure and direction. Trend Sensing™ electronics increases sensitivity in the pressure range so that the operator can use alcohol to find vacuum leaks. Also see explosion proof gauge sensors. Myers Vacuum also produces vacuum stills and Celvaseal Leak sealant.
NILES ELECTRONICS, INC. Booth 513
www.nileselectronics.com
Niles Electronics developed the world's first Electron Beam (E-Beam) Gun Switching Power Supply in 1990, and remains the market leader. Our products are distributed worldwide under either private labels or our own label and are renowned for their reliability and innovative technology. Whether bought under distributors' names or the Niles Electronics label, our Switching Power Supplies and Sweeps are guaranteed to have superior quality and performance for your Thin Film Vacuum Coating needs. We are located in the Bay Area of Northern California, USA.
Nivo Technology (USA) is a leading thin film coating material manufacturer. Our company specializes in making high quality evaporation material for optical thin film coating. We make a full line of oxides, fluorides, and compound including SiO2, TiO2, Ta2O5, MgF2, Ti3O5, YF3, YbF3, Y2O3, Sc2O3 etc. High quality, competitive price.
NOR-CAL PRODUCTS, INC. Booth 107
Manufacturer of high vacuum components since 1962. Standard components: flanges, fittings, viewports, feedthroughs and flexhose; isolation and pressure control valves; thermal products; molecular sieve, particulate and cold traps; thin film components; pressure gauges and manipulators. Custom components: chambers, traps, manifolds, collars and baseplates from customer specs. 3D Model Library on-line. ISO 9000-2001 registered.
NVSTech offers complete range of vacuum products in all sizes of flanges and fittings in CF, KF and ISO types, all types of valves: butterfly, right angle and gate valve, and custom built chambers and Helium Leak Detectors. We also offer Molybdenum and Tungsten Products used in manufacturing of sputter targets, evaporation materials and vacuum metallization. www.nvstech.com
OERLIKON LEYBOLD VACUUM USA INC. Booth 411
www.oerlikon.com
Oerlikon Leybold Vacuum is an ISO 9001 manufacturer of vacuum pumps, leak detectors, gauges and hardware for use in Vacuum Coating including chemical and physical vapor depositions onto ceramics, glass, metals, paper and plastics. Vacuum pumps include vane and piston, dry compressing screw, boosters, turbomolecular, diffusion, cryogenic as well as customized pumping systems and repair of all brands.
ORYX ADVANCED MATERIALS, INC. Booth 507
ORYX Advanced Materials is a leading supplier of PVD targets, shields and cleaning services, and bonding/backing plate services. ORYX serves the data storage, large area coatings, display, wear/decorative, and solar markets. ISO-9000-locations include: Fremont, Penang, Shenzhen, and Singapore.
OSAKA VACUUM U.S.A., INC. Booth 305
Osaka Vacuum has been supplying vacuum pumps since 1950. Our high quality reliable turbo pumps are suitable to thin-film applications and emerging technologies. TG-M: Digital Mag-Lev turbo pumps (390-420-900-1300-2400-3200 L/Sec) Compact & lightweight. Corrosive version is available. TG-F: Ceramic ball-bearing turbo pumps (50-70-220-350-450-800-1100-1400-2400 L/Sec) Affordable price, user-friendly, and high durability. Please visit www.osakavacuum.co.jp
Pfeiffer Vacuum manufactures and services a complete line of vacuum products used in the coating industry. Pfeiffer's flagship product, the Turbomolecular pump, is available with integrated controllers and power supplies, which make them ideal for everything from large coating systems to more compact benchtop coaters. Pfeiffer also manufactures roots and rotary vane pumps, vacuum gauges, helium leak detectors, valves, vacuum components and mass spectrometers providing the best solution for your vacuum application.
CVI TorrMaster® Cryopumps and Cryocoolers are manufactured and serviced by PHPK Technologies. PHPK specializes in the design and manufacture of vacuum chambers, pressure vessels, cryostats, cold boxes, compressor skids, thermal shrouds, and turnkey engineered systems. PHPK also produces standard components for the vacuum industry including VJ piping, valves, bayonets, and seal-off valves.
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PLANSEE GMBH Booth 606/608
www.plansee.com
High performance materials for the vacuum coating industry" As the global market leader, Plansee is a reliable partner regarding production and supply of targets and components for PVD coatings. Using our core competency in powder metallurgy, we offer solutions employing materials like molybdenum, chromium, titanium, aluminium, their alloys and ceramics.
PLASMA PROCESS GROUP, INC. Booth 1027
Plasma Process Group, Inc. makes DC & RF ion beam sources, power supplies, systems, and components, ranging from replacement parts such as grids, to complete thin film systems. We repair and refurbish ion beam equipment, including Ion Tech, and power supplies, and offer custom engineering services and support for unique applications.
Plasmaterials, Inc, since 1987, has been supplying the thin film industry with high quality sputtering targets and evaporation materials for use in Physical Vapor Deposition (PVD) equipment and related applications. These high-purity materials are well suited for industrial applications, laboratory processing, research and development applications, pilot and production applications, as well as full volume production. For use in microelectronic, automotive, display, hard coating, architectural glass, hard coating, semi conductor, optical, packaging, decorative, anti-corrosive coating applications. In addition, metallic bonding services, backing plates, E-beam starter sources and crucible liners are all available either "off the shelf" or through custom design.
PRECISION METAL WORKS LTD. Booth 1201
Since 1988, Precision Metal Works Ltd. has manufactured high and ultra-high aluminum and stainless weldment vacuum chambers for the top names in Research and Development, semiconductor, solar and thin film coating. We are known for our quality, for our pricing and for our service. We specialize in large, complex chambers and have an engineering team who can design your chamber or carry out FEA studies if required.
PROCESS MATERIALS, INC. Booth 201
As a worldwide manufacturer and marketer of sputtering targets, evaporation materials, backing plates, bonding services and plasma spraying services, Process Materials, Inc. is focused on providing and perfecting the highest level of product performance. The Vacuum Equipment Division specializes in remanufactured or upgraded evaporation and sputtering systems including PLC automation.
PROTECH MATERIALS, INC. Booth 512
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ProTech Materials Inc. has served the vacuum coating industry with high quality products since 1997. We have strong capability of engineering and manufacturing specialty targets such as ITO, AZO, CdS, TiAl and Mo at production scale. Indium and its recycling have also been one of our core businesses. Whether your goal is developing new thin film materials, lowering cost, or shortening lead-time, we provide solutions with our expertise in materials and sputter deposition. .
PROVAC AG-RICMAR SALES & SERVICE Booth 1030
www.ricmar.at
Provac-AG, a member of the RICMAR Group, designs, manufactures, services, and refurbishes high vacuum coating systems for precision optics, semiconductor, microelectronics, and ophthalmic markets. Since 1992, Provac's technical expertise and keen ability to provide customers with optimized hardware configurations-application specific tailored processes, continuously improving technology, and superior on-site service.
Ricmar's Sales and Service organization is your worldwide point of contact providing responsive technical, sales, and service support for our partner companies; Provac (Vacuum), Proaut (Automation), Hacker Automation (Dispensing), Ricmar Technology (Automation), Filmetrics (Metrology) and Mechatronic (Wafer Handling). We act local and think global. Contact David Gary at (831) 688-4525 or david.gary@ricmar.com. Visit us on the web at www.ricmar.com.
PTB Sales, Inc. is dedicated to saving you time and money. We Sell and Repair DC Magnetron and RF power supplies from all manufacturers. PTB also remanufactures, sells and exchanges USED and REMANUFACTURED cryogenic, turbo, rotary vane, piston, dry, and diffusion pumps, in-house, to meet or exceed all manufacturers' performance specifications. Our one-year parts and labor warranty is a testament to PTB's quality and confidence. PTB Sales also buys your surplus equipment.
PVT PLASMA UND VAKUUM TECHNIK GMBH Booth 304
PVT - People with Vision and Technology – PVT Plasma und Vakuum Technik GmbH is a manufacturer of PVD-coating equipment for industrial thin film applications. Wear resistant, erosion resistant, tribological and decorative coatings for the aircraft, automotive and cutting tool industry are deposited by arc-evaporation and magnetron sputtering. PVT's innovation in processes, coatings and equipment benefit our worldwide customer base.
QUADRANT TECHNOLOGY Booth 1242
Quadrant Technology is the industry's cutting edge developer and producer of intricate magnetic assemblies with a focus on thin film magnetron assemblies and magnetically coupled devices for motion in and outside vacuum. Quadrant Technology has full capabilities to take your project from the conceptual engineering to delivery of final product.
The R. D. Mathis Company specializes in the fabrication of high vacuum evaporation sources for the thin film coating industries. We offer a comprehensive selection of Tungsten, Molybdenum and Tantalum sources through our catalog as well as custom fabrication to meet your specific coating needs. We also offer our "LV Series" Low Voltage, High Current Power Supplies and our "GP 100" Inert Gas Purifier to compliment your evaporation process. Please stop by our booth or call for more information about our products.
REACTIVE NANOTECHNOLOGIES, INC. Booth 1223
www.rntfoil.com
Reactive NanoTechnologies, Inc. (RNT) develops and manufactures NanoFoil® to precisely control the instantaneous release of heat energy for reaction initiation and joining applications. Building from its strengths in material science, computer modeling and process engineering, RNT provides solutions to its partners and customers in commercial and defense industries. NanoBond®, our patented process for bonding utilizing NanoFoil®, has been proven by the vacuum industry to be a highly successful bonding process for joining CTE mismatched target materials (ceramic-metal) with significantly lower residual stresses than conventional bonding processes.
RESEARCH AND PVD MATERIALS CORPORATION Booth 1307
Research and PVD Materials Corporation manufacturers a wide variety of highly characterized, high purity materials: metals, alloys and ceramics. Products include sputtering targets, evaporation sources, plating anodes and custom-fabricated, one-of-a-kind items manufactured from all specialty and exotic materials.
RIGAKU INNOVATIVE TECHNOLOGIES Booth 308
Rigaku Vacuum Products offers advanced Magnaseal magnetic fluid sealed rotary motion feedthrough systems at very competitive prices. Direct competitors' replacements and Rigaku designs are stocked for immediate delivery, with custom designs available for OEM applications. The Rigaku Magnaseal employs a patented balanced magnet circuit with near-zero fringe field and reliable operation in an external high magnetic field.
ROCKY BROOK ASSOCIATES, INC. Booth 322
Rocky Brook Associates, Inc. manufactures Copper, Titanium and Aluminum Sputtering Targets in a wide range of styles and sizes (Purities to 99.999%). Many examples will be on display. Both custom and standard designs of direct or internally cooled backing plates from our production will also be on display. We service end users, OEM's, bonders, custom target makers and distributors.
SAGE INDUSTRIAL SALES, INC. Booth 213
www.sage4sales.com
SAGE industrial sales, inc. provide electron beam parts, consumables and accessories that are shipped the same day of ordering. You can talk to real people, no voice mail tag, get answers to your questions within one day and get custom parts quotes easily. We are easy to deal with and can set-up automatic monthly shipments of parts; drop ship to different addresses and you can pay by check, wire or credit card. We have a big selection of parts but are small enough to provide great customer service. SAGE - THE WISE CHOICE.
SCALAR TECHNOLOGIES Booth 1041
www.scalartechnologies.com
Scalar technologies Ltd. is a leading developer and manufacturer of non-contact, thin film thickness measurement instrumentation and systems. The company is pleased to introduce SGVacuus, a new range of in situ broadband optical monitoring systems that provide excellent measurement and control capabilities for single and multilayer vacuum deposited coating applications.
SCI ENGINEERED MATERIALS Booth 1210
SCI Engineered Materials produces high-quality sputtering targets for photonic, solar, thin film battery, hard disk drive, semiconductor, and other PVD applications. SCI is known for high-purity ceramic and metal sputtering targets as well as superconducting materials. SCI partners with customers to develop innovative material solutions.
Scientific Systems is a leading designer and manufacturer of plasma diagnostic equipment for research and industrial applications. Our Langmuir Probe, Advanced RF sensors and RF Arc Detect solutions are used in Semiconductor and Flat panel display manufacturing, Solar research, medical device plasma coatings and plasma surface treatments.
SEMICORE EQUIPMENT, INC. Booth 605
Semicore supplies New and pre-owned Sputtering systems for Thin film deposition, Solar cells, MEMS, Nanotechnology and related industries. From custom configurations, OEM to Remanufactured PC/PLC control systems with all of the latest technologies. Get Semicore involved with your upcoming needs or special PVD equipment requirements.
SHIMADZU PRECISION INSTRUMENTS Booth 603
Shimadzu specializes in extremely reliable, large maglev turbopumps. Shimadzu 5-axis turbodrag pumps are lubricant-free and feature pumping speeds from 190 to 6,300 L/s. Realize significant time and money savings by using large pumps to replace multiple smaller pumps. Find out why Shimadzu is the fastest growing maglev turbo maker.
SIDRABE, INC. Booth 414
www.sidrabe.com
Sidrabe, Inc., designs and manufactures customized and standard equipment and processes for webs, 3D-parts, metal strips, glass and powders. The company has knowledge and experience of Lithium coating of polymer films or metal foils and deposition of layers for solar materials. Sidrabe performs contract research and development work as well as providing commissioning, service and guarantees.
SIERRA APPLIED SCIENCES, INC. Booth 1024/1026
www.sierraapplied.com
Sierra Applied Sciences, Inc. is the world leader for magnetron sputtering technology for all deposition applications. With our superior designs, customization and diverse cathode product lines, we can support and address any customer's complex deposition applications ranging from decorative to magnetic media. Sierra Applied's cathodes offer the highest target utilization available in the industry today, as well as the largest variety of cathode sizes, configuration and mounting options.
SIGMA INSTRUMENTS, INC. Booth 1109
Sigma Instruments designs and manufactures instrumentation for measurement and control of thin film vacuum processes. Our cost-effective product line is the broadest in the industry, ranging from the simplest QCM transducer (our new "Q-podTM), to 8-channel co-deposition controllers, including a complete controller on a plug-in PCI card for your computer. Our GuardianTM, based on EIES, is ideal for fabricating complex multi-material films, in applications like MBE, OLEDs, and CIGS/photovoltaics.
SIGMA TECHNOLOGIES INTERNATIONAL, INC. Booth 520
Sigma Technologies builds equipment for treating, grafting and coating surfaces. Equipment includes plasma systems for vacuum metallization, nano-polymer coating systems and atmospheric plasma for cleaning and treating surfaces of films, foils, paper, foams and fabrics. Surface properties include high and low surface energy, gas and vapor barrier, color, antibacterial, release and other.
SOLERAS LTD. Booth 116/118/1000
Soleras Ltd. has been a market leader in manufacturing PVD coating materials for 30 years, specializing in Photovoltaics, Displays, Glass, Web, Decorative, Tribological and related applications. Soleras offers targets in both Rotary and Planar design, with enhancements to increase target life. Products also include Backing Plates, Cathodes - Rotary and Planar, Shielding, Insulators, Bonding and Brazing.
SOLID SEALING TECHNOLOGY, INC. Booth 1241
Solid Sealing Technology, Inc specializes in the design and manufacture of highly engineered, hermetic products using metalizing and brazing, glass-ceramic sealing, welding, and critical mechanical assembly. Products include: Vacuum Feedthroughs, Coaxial Connectors, Multi-Pin Connectors, Thermocouple Connectors Isolators. With over 100 years of combined design and industry expertise, SST provides sealing solutions for high temperature, ultra-high vacuum, and high-pressure environments. SST is a global provider of standard and custom products.
SOLVIX SA Booth 302
www.solvix.ch
SOLVIX is offering a superior line of DC, DC-pulse and arc-evaporation Plasma Power systems to the advanced coating and surface treatment industries for Hard and Decorative Coatings, Optical and Industrial Glass, Data-Storage, Flat-Panel, Semiconductor, Photovoltaic and Tribological applications. SOLVIX has a wide range of standard products and can supply customer specific power solutions.
SPECS SCIENTIFIC INSTRUMENTS, INC. Booth 1332
SPECS Scientific offers: Sputter Equipment, Sputter Sources, Analytical Instruments, Organic and Biological Deposition Techniques, Surface Analysis, AFM/STM, UHV System, In-Situ Growth Monitoring, XPS, Auger, OLED, MBE, ALD, CVD, Optical Components, Spintronics, RHEED, E-Beam Evaporation, Plasma Source, Kelvin Probe, UHV equipment etc. For more information please visit our web-site at: www.specs.com.
SPUTTERING COMPONENTS, INC. Booth 202
Sputtering Components, Inc. (SCI) has developed a new cylindrical rotary sputtering magnetron for large area coaters. A simple, robust, low maintenance and low cost cylindrical magnetron with the fastest target change available designed for the industries' shift to high energy AC power. SCI understands the needs and requirements for maximizing end user profitability. SCI expertise extends to the custom design and fabrication of rotary and planar cathodes of any size.
SUMITOMO (SHI) CRYOGENICS OF AMERICA, INC. Booth 1221
www.shicryogenics.com
Sumitomo (SHI) Cryogenics of America, Inc. (SCAI), part of the SHI Cryogenics Group, has been producing quality cryogenic equipment for nearly 50 years. SCAI’s diverse product line features the Marathon® CP Cryopump, which is designed to handle the diverse and demanding requirements of a broad range of vacuum and deposition technologies, while its pumping performance remains unsurpassed in the industry.
The SVC Foundation's principle objective is to award scholarships to existing technicians and other workers in the vacuum industry as well as to attract new talent through University and other advanced learning institutions. The scholarships are funded by donations from individuals and companies. A board of directors selected from existing and past SVC members, directors and officers, oversees the foundation.
SVS VACUUM COATING TECHNOLOGIES Booth 607
SVS, successor company of the former Leybold, Hanau Hard Coating Division, is designing and producing PVD batch type and inline coating equipment based on advanced HIPIMS process technologies. Superhard Carbon-DLC- and Metal-DLC-coatings with outstanding properties (high hardness, excellent adhesion, low friction, low wear, no droplets, etc.) are the latest available results.
SYCON INSTRUMENTS, INC. Booth 1325
Sycon Instruments, Inc. is a manufacturer of Thin Film Deposition Monitors and Controllers utilizing the quartz crystal sensing techniques. These products include the STC-2002, deposition controller, STM-100/MF, Thickness Rate Monitor, the STC-2000A, deposition controller for the budget minded, and the EBS-530, E-Beam Sweep Control for Electron Beam Sweep Control. We also carry the STM-1 Monitor with integrated oscillator for use with Lab View on your PC, the SRT-422 E-Beam Source Indexer, the T-3000 Deposition Power Supply, the VSO-100 In-Vacuum sensor oscillator and a complete line of sensors, crystals and feedthroughs. All products are available for quick delivery all over the world.
SYNERGY VACUUM, INC. Booth 1130
SYNERGY VACUUM – Original ANEST IWATA Oil-Free Scroll Pumps; An Oil-free pump/blower package; Turbo Pump & RGA Carts; a new lineup of diaphragm pumps; the DVSL 100B & 501B high vapor pumping capacity oil-free scroll pumps. With all our products, we offer Total Support - customizable OEM service & maintenance; www.synergyvacuum.com
SYSTEM CONTROL TECHNOLOGIES (SCT) Booth 1205
System Control Technologies manufactures physical vapor deposition systems. We offer a full line of evaporation and sputtering equipment. Our versatile systems are used in many markets, including production or research and development for semiconductor, compound semiconductor LOF, MEMS, optical and special applications.
TECPORT OPTICS, INC. Booth 1213
Tecport Optics, Inc. is an industry-leading manufacturer of top quality Vacuum Coating Systems. Sophisticated systems employ leading edge technology such as plasma-assisted deposition. Systems are custom built and pre-configured for your process and your volume. Process is pre-configured, and installed systems are production-ready within one week. We offer TOP QUALITY + EXTREMELY COMPETITIVE PRICING.
Teer Coatings Ltd specialize in production PVD coatings and the manufacture of PVD coating systems. A wide range of coatings are available, including hard coatings and the patented solid lubricant coatings MoST, Dymon-iC and Graphit-iC. Coating systems are available from large-scale production systems to small R&D systems.
Telemark offers evaporation components, including electron beam sources, e-beam power supplies, optical monitors, plasma chemistry monitors, water vapor cryotraps, quartz crystal deposition controllers and related accessories. New products recently introduced include Cheetah Switching Power Supplies with an innovative digital programmable sweep and the small TVP-1000 cryotrap.
THERMAL CONDUCTIVE BONDING, INC. Booth 613
www.tcbonding.com
Since 1998 TCB has provided premium quality bonding services for the high technology communities. Early on TCB successfully developed a number of proprietary bonding techniques that uniquely address bonding issues relating to assemblies such as Sputtering Targets, Electrostatic Chucks, and Gas Dispenser Plates. TCB has been focused on providing bonding solutions for the thin film and semiconductor community. How can we help you? Capabilities include: Indium bonding/debonding, Rotary target bonding, Elastomer bonding/debonding, Engineering and Design assistance, Class 1000 Clean Room Assembly, Fully equipped CNC Machining facility.We have facilities in California, Korea and Germany. Thermal Conductive Bonding, Inc. - ISO 9001:2000 registered company.
THERMIONICS VACUUM PRODUCTS Booth 1320
Thermionics Vacuum Products manufactures vacuum components, systems and accessories for production and research applications including: our new 1500cc capacity IC series eGun; our RC series of 3kW sources; our HC series e-Guns™ with dual filament capability for demanding production coating applications; 3-20 kW e-Gun™ evaporation sources; our new compact line of manipulators; PyraFlat™ rectangular flanges and waveguides; TriBond™bi-metallic flanges and fittings; gate and poppet valves; sample handling and transfer systems; ion pumps; maTChed™ thermocouple gauges; and mechanical, electrical and fluid feedthroughs.
THIN FILM CENTER, INC. Booth 405
Thin Film Center is a major resource for optical coating technology. Its primary product is the Essential Macleod software for optical coatings. This comprehensive collection of tools covers design, analysis and manufacture of coatings, systems of coatings, prism assemblies, telecom components, ultrafast coatings. Powerful scripting tools extend the usefulness still further. A production simulator studies manufacturing issues including tolerances. Training courses in optical coatings are held regularly in Tucson, AZ, and London, UK, and are also available by request. Consulting services are available.
TMPI is a leader in the precision cleaning industry, and highly environmentally conscious. We clean both new and used parts for semiconductor, solar, biomedical and related companies, using both chemical and mechanical cleaning processes. We are ISO 9001-2000 certified and committed to meeting or exceeding your cleaning quality expectations.
Toho Technology provides industry standard metrology solutions. The new and improved FLX-2320-S measures intrinsic or thermal stress, expansion coefficients, 3D stress and more on a Windows XP platform. Toho's FP-20 Profilers features patented KLA-Tencor technology. Accurate film thickness measurements are provided through the Toho NanoSpec series for various large substrates.
TORR INTERNATIONAL, INC. Booth 1124
www.torr.com
Torr International, Inc. product range includes Magnetron Sputtering, E-beam and Thermal Evaporation Systems for diverse applications in Nanotechnology, from specimen preparation for SEMs to R&D with metal, dielectric and organic materials to Custom-built multi-target sophisticated systems for special applications. Torr also manufactures Reactive Ion Etchers, PECVD and plasma process machines for metals, dielectrics and polymers. Torr also manufactures Combination systems and compact research coaters and supplies all the accessories needed for Thin Film Deposition work. Torr serves a worldwide market in the areas of Thin Film Deposition and Etching as well as high vacuum technology.
TORR-VAC TECHNOLOGIES Booth 1310
For over 25 years, TorrVac engineers have been manufacturing custom vacuum technology for scientific research and other high-tech industries. Their focus is high quality products and services that won't break the bank. TorrVac Technologies offers custom vacuum componentsand systems including feedthroughs, mass flow controllers/gas control systems, RGA/Mass Spec, turbo/mechanical pump and controller repair, vacuum components/hardware, and cryogenic valves/controller systems as well as process development, consulting, troubleshooting, equipment relocation, integration and onsite maintenance services.
TRIBOtechnic equipment is the culmination of 18 years of market experience and 30 of tribological testing. Equipped with the latest technological advances, our instruments have exclusively patented features for Research and Development or measuring Quality Control. Our Scratch-tester Millennium, TRIBOtester and NANO TRIBOtester instruments conform to industry standards, are user friendly and economical to maintain.
TRINOS VACUUM SYSTEMS, INC. Booth 1328
Trinos Vacuum Systems Inc. designs and manufacturers vacuum chambers and components for high & ultra high vacuum applications. The Trinos Team can help take your vacuum chamber from concept to reality. Stock items include, flanges, fittings, viewports, flex connectors, valves, feedthroughs, manipulators and more. Any item can be customized to meet your unique requirements. Let us help you find the right solution for your vacuum needs.
TUTHILL VACUUM & BLOWER SYSTEMS Booth 1204
Tuthill Vacuum & Blower Systems manufactures both Kinney® and atlantic fluidics® vacuum pumps and systems. Our product offerings are very diverse, with rotary piston, liquid ring, rotary vane, and dry screw vacuum pumps, as well as complete engineered solutions to provide custom vacuum equipment packages tailored to your specific needs.
