1990 33rd Technical Conference Proceedings

Note: Number in brackets on the top line is the paper number for 1990.

Plenary Session

Engineered Surfaces for Engineered Materials [1]
J.A. Huebner, GE Plastics..... 3

Progress and Barriers to Progress in Optical Coatings [2]
H.A. Macleod, Optical Sciences Center, University of Arizona..... 7

Recent Advances in Physical Vapor Deposition for Web and Strip Steel Coating [3]
S. Schiller, M. Neumann and H. Forster, Forschungsinstitut Manfred von Ardenne, Germany.....13

Vacuums on the Horizon [4]
G.L. Parr, R&D Magazine.....19


Vacuum Technology

Using a Personal Computer to Size Vacuum Pumps to System Requirements [5]
D.C. Planchard, CTI-Cryogenics.....25

Improved Cooling for an Electron Beam Crucible [6]
G. Crumley, P. Chang and P.A.J. Smith, Temescal.....29

Pumping Condensable Gases with Oil-Free Roughing Pumps [7]
M. Hablanian, Varian Vacuum Products; and E. Bez, CSIRO, Australia.....33

Magnetron Sputter Deposition of Magnetic Materials from Thick Targets [8]
J.A. Brewer, M. Migliuolo and R.M. Belan, Kurt J. Lesker Co......37

3" C-MAG™ Sputter Deposition Source Development [9]
B.P. Barney, Airco Coating Technology.....43


Compact Disc & Media Technology

CD Metallizers with Production and Format Flexibility [10]
R.M. Schmidgall and W. Flaherty, Balzers.....51

Singulus 130/200/300: A New Generation of Sputter Coaters for Audio and Video Disc [11]
A. Petz, R. Seiler and S. Reineck, Leybold AG, Germany; and D. Butrymowicz, Leybold Technologies, Inc......58

Automatic Inspection of Compact Discs [12]
G.R. Mather, Jr. and A. Harmala, Automatic Inspection Devices, Inc......64

Platinum Single Layer Deposition for WORM Applications [13]
R. Longman and I. Sanders, Plasmon Data Systems, United Kingdom; G. Brauer and S. Reineck, Leybold AG, Germany.....70
Technical and Economical Advantages for Inline Production of Magneto Optical Disks [14]
R.M. Schmidgall, Balzers.....76


Vacuum Web Coating

The Japanese Market for Sputtered Films [15]
H. Miyake, Toyobo, Japan.....85

European Markets & Market Opportunities for Vacuum Web Coating [16]
W. Siefert, Renker GmbH, Germany.....95

Electrochromic Sun Control Coverings for Windows [17]
D.K. Benson and C.E.Tracy, Solar Energy Research Institute.....98

A Roll Coater System for the Production of Optically Variable Devices (OVD's) for Security Applications [18]
I.M. Boswarva, J.N. Disano, J.W. Goodanetz and D.G. Smith, Vadeko International, Inc., Canada; and A. Shimizu, Ulvac Japan Ltd., Japan.....103

High Speed Sputter Web Coating with Rotating Magnetrons [19]
H. Clow, Airco BVT Coating Technology Ltd., United Kingdom.....110

Sputtered Film Products at Near Metallizer Speeds [20]
I. Ritchie and W.C. Kittler, Jr., Courtaulds Performance Films.....115

Metallizer Web Drive Systems: Their Development from the 'Sharp End' [21]
I. Watts, I. Watts Consultancy Ltd., United Kingdom.....122

Improvement in the Vacuum Web Coaters Design for High Quality Products [22]
C. Beccaria, A. Fusi and F. Rimediotti, Galileo Vacuum Tec SpA, Italy; and P. Cerolini, Centro Technologie del Vuoto, Italy.....128

Aspects of Vacuum Web Coating: Thermo-Mechanical Behaviour of the Web during Coating [23]
W. Schwartz and H. Weisweiler, Leybold AG, Germany.....140

Reflection Monitoring for Optical Web Coating Production [24]
S.F. Meyer, Southwall Technologies, Inc......146

Microwave Susceptors: Aluminum versus Alloy Coatings, Optical Density versus Direct Resistance Measurements [25]
G.J. Walters, Advanced Dielectric Technologies, Inc......153

Control of Metal Deposition in a Web Coater: Controlling in both Transverse and Machine Directions [26]
F. Casey, General Vacuum Equipment, United Kingdom; and A.A. Broomfield, General Vacuum Equipment.....157

Transparent Barriers for Food Packaging [27]
T.G. Krug, Leybold AG, Germany 163

Development of Industrial Vacuum Web Coater for Barrier Films [28]
K. Komatsu, T. Yamamori, T. Miyabayashi, T. Suzuki, K. Inagawa and K. Matsumori, Ulvac Japan Ltd., Japan.....170

Transparent Gas Barrier Technologies [29]
J.T. Felts, Airco Coating Technology.....184

DC Glow Effects on Web Temperatures [30]
K.J. Blackwell, F.D. Egitto and A.R. Knoll, IBM Corporation.....194

Stresses of Chromium, Copper and Kapton™ on a Two Side Metallized Web [31]
P.C. Chen, IBM Corporation; and Y. Oshida, Syracuse University.....200

Plated Cu Line Thickness Effects on Peel Test Values [32]
P.C. Chen, K.J. Blackwell and W.T. Pimbley, IBM Corporation.....205

Deposition Technology for Glass Barriers [33]
D. Chahroudi, Suntek.....212


Optical Coatings

Optical Thin Film Technology: Past, Present, and Future [34]
W.P. Strickland, Brysen Optical Corporation.....221

Complete Process Control/Automation for Complex Deposition Processes [35]
A. Smith, M. Holbrook, W. Beckmann and D. Loomes, Intellemetrics, Ltd., United Kingdom.....227

Realization of a Very Broad Band AR Coating [36]
R.R. Willey, Opto Mechanik, Inc......232

Techniques for Solving Optical Thin Film Adhesion Problems Without Sophisticated Equipment [37]
J.A. McCandless, Contraves USA.....237

Uniformity of Coating Thickness on the Insides of Rotating Cylinders [38]
A. Musset, Denton Vacuum, Inc......243

A Design Techniques for Multiband AR Coatings [39]
W.C. Hermann, Jr. and D.E. Morton, Optic-Electronic Corp......246

New Coaters Employing DC Sputtering of SiO2 for the Production of Optical Components [40]
M.W. McBride, Airco Coating Technology.....250

Deposition of ZnO: Transparent & Conducting Thin Films by DC Magnetron Sputtering [41]
N. Ogawa, T. Mori and T. Iwamoto, Tosoh Corp., Japan; T. Minami and S. Takata, Kanazawa Institute of Technology, Japan.....257

The Invisible Enemy: Identification and Control of Airborne Contaminants in the Manufacturing Environment [42]
L.E. Wetzel and S.E. Mackler, Clestra Cleanroom Technology.....262

Removal of Excess Heat in Vacuum Deposition Operations: An Overview [43]
D.J. Missimer, Polycold Systems, Inc......269

Low Cost Chiller System for Coating Equipment [44]
T.E. Wisnewski, Opto Mechanik, Inc......274

A Closed Loop Cooling System for Small Coating Plants [45]
S.J. Gordon, Deposition Sciences, Inc.; and D. Harp, Hydro-Pure Water Treatment Company.....278

Practical Consideration in the Design and Operation of Cooling Towers for Use with Vacuum Process Equipment [46]
D.J. Zahniser, Coherent, Inc......284


Industrial Thin Films

Studies on Sputtering Characteristics of ITO Target Materials [47]
N. Ogawa, T. Mori and T. Iwamoto, Tosoh Corp., Japan; T. Minami and S. Takata, Kanazawa Institute of Technology, Japan; Y. Murayama, K. Kashiwagi and O. Itoh, Toyo University, Japan.....289

Requirements for Abrasion Resistant Coatings on Polymeric Composites [48]
D.L. Chambers, G.T. Susi, K.A. Taylor and C.T. Wan, Xytorr Corporation.....293

Ionised Cluster Beam Deposition Experiments with Sodium [49]
R.M. De Gryse and J. Vennik, Laboratorium voor Kristallografie en Studie van de Vaste Stof, Belgium.....299

Reproducible In Situ Sputter Deposition of Superconducting YBa2Cu3O7 Films [50]
P.H. Ballentine, J. Archer and J.P. Allen, CVC Products, Inc; and A.M. Kadin, University of Rochester.....303

Plasma Deposition of Thin Films Utilizing the Anodic Vacuum Arc [51]
H. Ehrich, B. Hasse, M. Mausbach and K.G. Muller, Institut für Laser und Plasmaphysik, Universitat Essen, Germany.....308


Process Technology

Coatings Industry and Today's Regulatory Climate [52]
J.M. deHeus, Red Spot Paint & Varnish Co., Inc......317

High Ion Flux RF Source for Ion Assisted Processes [53]
G.A. Campbell, D.I.C. Pearson and A.P. de Chambrier, Plasma & Materials Technologies, Inc. 324

Multipurpose Laboratory Equipment for Ion Beam Experiments and Electrodeless Plasma Spraying Experiments [54]
M. Mayr and S. Weber, Heraeus Elektroden GmbH, Germany; H. Frey and I. Eisenlohr, LSG GmbH, Germany.....330

Establishing a Practical DC Glow Discharge "Cleaning" Procedure [55]
W.J. Miller, Stokes Vacuum, Inc......338

Plasma Polymerized Organosilicon Thin Films on Reflective Coatings [56]
S. Jost, Balzers Ltd., Principality of Liechtenstein.....344

Qualification/Quantification of UV 3D Dispersions [57]
R.T. Lake, Red Spot Paint & Varnish Co., Inc......347


Vendor Session

Monovat Slit Valves & Inserts [58]
G. Sele and J.A. Freeman, VAT, Inc......355

Balzers Box Coaters, Metallizers and Low Voltage Reactive In-Plating Systems [59]
R. Esposito, Balzers.....357

Plasma Instrumentation for Process Control [60]
A.P. de Chambrier, G.A. Campbell and D.I.C. Pearson, Plasma & Materials Technologies, Inc......361

Controlled Environments for Modern Industries [61]
L.E. Wetzel and S.E. Mackler, Clestra Cleanroom Technology.....363

A New Cold Cathode Ion Source (CC-103) [62]
A. Musset, Denton Vacuum, Inc......364

Improved Bayard-Alpert Gauge for 10-10 Torr to 1 Torr [63]
R. Paitich, Terranova Scientific, Inc......366

Vacuum Compatible Robot for Vacuum Deposition Processes [64]
K.J. Lesker III and J.A. Brewer, Kurt J. Lesker Company.....367

The Stokes Aluminum/Polymer Coating System [65 ]
H.R. Powell and S. Gelprin, Stokes Vacuum, Inc......368

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