1996 39th Technical Conference Proceedings

Note: Number in brackets on the top line is the paper number for 1996.

Plenary Session

Advances in Reactive Sputtering [1]
W.D. Sproul, BIRL, Northwestern University.....3

Perspectives from Space [2]
J.R. Lousma, U.S.M.C. (retired) .....7

Process Control and Instrumentation

Optimising Surface Configuration for Cryopumping in Transition and Viscous Flow Regions [3]
D.J. Missimer, Polycold Systems International.....13

Reducing Process Variation through Multiple Point Crystal Sensor Monitoring [4]
J. Kushneir and C. Gogol, Leybold Inficon, Inc.; and J. Blaise, OFC Corporation.....19

Application of Computer Process Control to a Physical Vapor Deposition Coating System [5]
K.E. Switzer, Gold Star Coatings, Inc......24

Reactive PV Deposition of Insulators [6]
R.A. Scholl, Advanced Energy Industries, Inc......31

An Improved Metallized Film Capacitor Using a New Acrylate Coating Process [7]
D. Shaw, Catalina Coatings, Inc.; R. Jones, Bolmet, Inc.; and P. Legonidec, BolloreTechnologies,
Quimper, France.....36

Decorative and Functional Coating

One Stop Coating Process Using Cathodic Arc Plasma Deposition [8]
B. Lee, Vacuum Plating Technology Corporation.....43

Aqueous Cleaning Design Considerations for Vacuum Decorative Coating [9]
J.D. Bloomgren, Forward Technology Industries.....50

Automated High Through-Put Surface Preparation and Vacuum Coating System for High Volume PVD Substrate Applications [10]
A.B. DeWald, Jr., Diamond Black Technologies, Inc......58

Advanced Functional Physically Vapor Deposited Coatings [11]
K.J. Puska, W.T. Langendorfer and K.E. Switzer, Gold Star Coatings, Inc......64

Surface Leveling in the 1990's and Beyond [12]
D.W. Jean, Hubbard-Hall, Inc......69

Physical Vapor Deposition Wear Resistant and Decorative Coatings [13]
M. Podob, Richter Precision, Inc......72

Palladium-Nickel as a Corrosion Barrier on PVD Coated Home and Marine Hardware and Personal Accessory Items [14]
E.J. Kudrak and E. Miller, Lucent Technologies.....78

Case Study: Lifetime Anti-tarnish Warranty [15]
S.K. McKenzie, Vapor Technologies, Inc......82

Production Testing of Aqueous Cleaning Systems [16]
D.K. Roberts, R.D. Pirrotta and M.L. Klingenberg, Concurrent Technologies Corporation.....85

Wear and Corrosion Resistant Decorative Hard Coatings in Large Volume PVD Units [17]
A. Hurkmans, Hauzer Techno Coating Europe B.V., The Netherlands; and D. Bass,
Hauzer Techno Coating, Inc......91

Reactive Cylindrical Magnetron Deposition of Titanium Nitride and Zirconium Nitride Films [18]
D.E. Siegfried and D. Cook, Ion Tech, Inc.; and D. Glocker, Isoflux, Inc......97

Process Diagnostics, Vacuum Quality Determination and Leak Detection in Vacuum Coating Applications [19]
P. Hatton, Hiden Analytical Limited, United Kingdom.....104

Developments in Decorative Coatings [20]
H. Maidhof, D. Hofmann, S. Kunkel and H. Schuessler, Leybold Systems GmbH, Germany.....109

Emerging Technologies

High-Power Pulsed Magnetron Sputter Technology [21]
V. Kirchoff and T. Kopte, Fraunhofer-Institut für Elektronenstrahl-und Plasmatechnik, Germany .....117

Asymmetric Bipolar Pulse DC - an Enabling Technology for Reactive PVD [22]
J.C. Sellers, ENI.....123

Linear Arc Discharge (LAD) - Radio Frequency Hollow Cathode Plasma Source for Low Pressure Processing [23]
L. Bardos, H. Baránková and S. Berg, Angstrom Consortium for Thin Film Processing,
Uppsala University, Sweden.....128

High Rate Coatings for Diffusion Barriers by Plasma Impulse Chemical Vapour Deposition [24]
B. Danielzik, W. Mohl, M. Spallek and M. Walther, Schott Glaswerke, Germany.....134

Path to Coatings Technology Based on Strongly Absorbed Light [25]
M.J. Kelley, DuPont Central Research Laboratory; and H.F. Dylla and G.R. Neil,
Continuous Electron Beam Accelerator Facility.....140

Advances and Applications of Vacuum Arc Plasma [26]
B. Lee, Y. Liu and H. Zhen, Vacuum Plating Technology Corporation .....144

Large Area Rigid Substrates Coating

Atomic Force Microscopy Study of ITO Coatings Deposited on Glass by DC Magnetron Sputtering [27]
A.W. Baouchi, Applied Films Corporation.....151

Advanced Low-Emissivity Glazings [28]
S. Nadel, BOC Coating Technology.....157

Leak Detection and Trouble-Shooting on Large-Scale Vacuum Systems [29]
M.L. Logan, Marcon Coatings, Inc. .....164

Scaleable Process for Pulsed DC Magnetron Sputtering of Non-Conducting Oxides [30]
J.M. Schneider, W.D. Sproul and A.R.T. Lefkow, BIRL, Northwestern University; A. Matthews, RCSE,
Hull University, United Kingdom; and M.E. Graham and J. Rechner, BIRL, Northwestern University.....168

Glass Reactivity and Its Potential Impact on Coating Processes [31]
P.F. Düffer, PPG Industries, Inc......174

Optical Coating

Optical Coatings on Flexible Substrates [32]
P.M. Martin, J.D. Affinito, M.E. Gross, C.A. Coronado, E.N. Greenwell, G. Deverman and
W.D. Bennett, Battelle, Pacific Northwest Laboratory.....187

Half-wave Holes, Leaks and Other Problems [33]
A. Macleod, Thin Film Center, Inc......193

Electric Probe Analysis of Cold Cathode and Hot Filament Ion Source Operating Conditions [34]
J.S. Ross and R.A. Hallman, Armstrong World Industries, Inc......199

Multilayer PECVD Coatings for Infrared Dome-shaped Optics [35]
D.F. Fuller and D.S. Fisher, Exotic Materials, Inc......204

Achieving Stable Results with Titanium Dioxide [36]
R.R. Willey, Lexalight International Corporation.....207

Method for Calculating the Sputter Distribution from a C-MAG^® Cylindrical Target in the Presence of Gas Scattering [37]
C.K. Carniglia, BOC Coating Technology.....211

Electrical and Optical Properties of Transparent Conducting Cadmium Stannate and Zinc Stannate Thin Films prepared by RF Magnetron Sputtering [38]
X. Wu, W.P. Mulligan and T.J. Coutts, National Renewable Energy Laboratory.....217

Very-High-Transmittance ITO-MgF₂ Films with Tailorable Conductivity [39]
R. Ferrante, A.M. Pal and P.D. Hambourger, Cleveland State University; J.A. Dever and S. Rutledge,
NASA Lewis Research Center; and E. Bruckner and K. Mayer, Cleveland State University .....222

Chemical Etching of ITO Coatings [40]
F. Krannig, Applied Films Corporation .....226

Heat Transfer and Stress Analysis of Bonded Sputter Target Assemblies [41]
D.G. Loveland, Cookson Technology Center, Kidlington, United Kingdom; and B.G. Lewis, Arconium .....230

Antireflective Layers Produced by Pulsed Magnetron Sputter Technology [42]
V. Kirchhoff, T. Kopte and U. Hartung, Fraunhofer-Institut für Elektronenstrahl-und Plasmatechnik,
Germany.....242

Monolithic Solid State Electrochromic Coatings for Window Applications [43]
S.P. Sapers, M.J. Cumbo, R.B. Sargent, V.P. Raksha, L.S. Wang, R.B. Lahaderne and B.P. Hichwa,
Optical Coating Laboratory, Inc......248

Business Aspects of Patents [44]
R.W. Phillips, Flex Products, Inc......256

Business Aspects of an Optical Coating Company [45]
R.W. Schaffer, Evaporated Coatings, Inc......261

Optical Thin Film Coatings Deposited Directly on Cathode Ray Tubes [46]
B.E. Kuhlmann, Viratec Thin Films, Inc......264

Front Surface Wear and Corrosion Resistant Metallic and/or Dielectric Mirrors for Automotive Applications [47]
G.A. Garzino-Demo and F.L. Lama, Braink AG, Principality of Liechtenstein.....270

Plasma Processing

Model of DC Magnetron Reactive Sputtering of the Silicon Target in Ar-O₂ Gas Mixtures [48]
A. Ershov and L. Pekker, Photran Corporation.....279

ATR-FTIR Spectroscopic Studies of PET Coated with Thin SiO₂ Barrier Layers [49]
N. Schühler, A.S. daSilva Sobrinho and J.E. Klemberg-Sapieha, Ecole Polytechnique, Montreal,
Canada; M. Andrews, McGill University, Canada; and M.R. Wertheimer, Ecole Polytechnique,
Montreal, Canada.....285

An Optical Feedback Control Detection System for Monitoring a Batch Processed Plasma Treatment [50]
H.J. Yoon, O. de Pierpont, K. Kenney, S. Page, T. Chen, F.M. Waltz, V. Iverson, J. Kelley, E. Stetz
and M.T. Stewart, Promeon, Center for Biomaterials Research.....290

Effects of Polymer Surface Characteristics on the Performance of PECVD Oxide Barrier Films [51]
R.W. Knoll and R.B. Heil, Johnson Controls, Inc......293

High-Rate Reactive Sputtering Deposition of TiO₂ Thin Films [52]
A. Ershov, Photran Corporation.....299

CD Manufacturing

Laser Light Scattering: An In-situ, Real-Time, Diagnostic Method for Detection and Control of Particulate Contamination in Thin Film Processing [53]
G.S. Selwyn, Los Alamos National Laboratory.....307

Power Supplies and CD Manufacturing [54]
R.A. Scholl, Advanced Energy Industries.....308

Addressing Issues in the Manufacture of Optical Discs [55]
C. Hougum, T. Hovatter, K. Ishiwa, C. Knight, D. Legrand, B. McKinley, W. Morris, W. Pan, C. Rijken,
W. Ward, M. Niemeyer and M. Lindsey, GE Plastics.....313

Vendor Session

Release Agents for Vacuum Coating System Cleaning [56]
J. Tilley and T. Madden, Superior Graphite Company.....319

The Astral™ Bipolar Pulsed Power Supply for Dual Cathode Sputtering [57]
D.J. Christie, Advanced Energy Industries, Inc......320

Dual-role Coating Design Software [58]
A. Macleod and C. Clark, Thin Film Center, Inc......321

eYeSYS ConvecTorr Gauge [59]
G. Santos, Varian Vacuum Products .....322

High Tech Web/Roll Coating System for R&D and Production [60]
G.O.B. Mahl, CHA Industries.....323

The PLS Series - Flexible Vacuum Processing Systems [61]
P.R. Puckett, R. Hellmer and T. Swanson, Pfeiffer Vacuum Technology.....327

Reactive Sputtering of Optical Thin Films [62]
S. Beißwenger, R. Faber and J. Szczyrbrowski, Leybold AG, Germany.....329

Sputter Deposition of Non-Conducting and Partially Conducting Materials using DC Magnetrons [63]
H.I. Foster, ERAD, International, Inc......330

Process Capabilities of Wide-Web PECVD Coaters [64]
H. Chatham, A. Smith, R. Smith, J. Rietzel and C. Woolley, BOC Coating Technology.....331

Selective Deposition of Aluminum on Plastic Parts for EMI Shielding [65]
D. Gwinner and P. Scheyrer, GfO Gesellschaft für Oberflachentechnik mbH, Germany; and
W. Fernandez, Vacuum Technologies, Inc......336

Solid Modeling Systems [66]
W.L. Holford, AAROFLEX, Inc......337

Vacuum Web Coating

Lithium-Ion Rechargeable Batteries and the Portable Communications User's Expectations [67]
F.P. Malaspina, Motorola.....341

Roll-to-Roll Fabrication of Amorphous Silicon Solar Modules On a Polymer Substrate [68]
F.R. Jeffery, D.P. Grimmer, S.A. Martens, M.L. Thomas and S. Braymen, Iowa Thin Film Technologies,
Inc.; and M. Noak, Iowa State University.....344

Roll-to-Roll DC Magnetron Deposition of Tungsten Oxide and Vanadium Oxide for use in Transmissive Electrochromic Devices [69]
S.P. Maki, M.D. Nachbor and D.J. McClure, 3M Corporate Research.....348

High Corrosion Resistant Reflective Coatings [70]
I. Ashmanis, A. Vovsi and Y. Lipin, J/S Co. Sidrabe Corporation, Latvia.....353

Patterned Metallized Printed (PMP) Hologram Structures [71]
G.J. Walters, Advanced Deposition Technologies, Inc......357

Durable Conductive Anti-Reflection Coatings for Glass and Plastic Substrates [72]
R.E. Laird, J.D. Wolfe and C.K. Carniglia, BOC Coating Technology.....361

Clear Barrier Films by Co-Evaporation: A New European Research Project Sponsored by Brite Euram [73]
A. Fusi, Galileo Vacuum Tec SpA, Italy; C. Misiano and F. Staffetti, Centro Tecnologie del Vuoto, Italy;
M. Kammer, Von Ardenne Anlagentechnik, Germany; and S. Raarup, Danisco, Denmark.....366

Web Coating by Reactive Plasma Activated Evaporation and Sputtering Processes [74]
S. Schiller, M. Neumann and F. Milde, Fraunhofer-Institut für Elektronenstrahl-und Plasmatechnik,
Germany.....371

The Substrate-Process Interface in Thin Barrier Film Coating [75]
C. Bichler, M. Bischoff, H.C. Langowski and U. Moosheimer, Fraunhofer-Institute for Food Technology
and Packaging, Germany.....378

Superior Polymer Webs via in situ Surface Functionalization [76]
A. Yializis, R. Ellwanger and A. Boufelfel, Sigma Labs.....384

Polymer-Oxide Transparent Barrier Layers [77]
J.D. Affinito, M.E. Gross, C.A. Coronado, G.L. Graff, E.N. Greenwell and P.M. Martin, Battelle, Pacific
Northwest National Laboratory .....392

Transparent Barrier Coatings for Flexible Packagings: Industrial and Research Activities in Germany [78]
H.C. Langowski, Fraunhofer-Institute Food Technology and Packaging, Germany.....398

Deposition of Alumina Layers on Plastic Films Using Conventional Boat Evaporators [79]
N. Schiller, J. Reschke, K. Goedicke and M. Neumann, Fraunhofer-Institut für Elektronenstrahl-und Plasmatechnik, Germany.....404

Inexpensive Transparent Barrier Coatings on Plastic Substrates [80]
C. Misiano, F. Staffetti, E. Simonetti and P. Cerolini, Centro Tecnologie del Vuoto, Italy.....413

Electric Arc Vaporization of Complex Alloys onto Polymeric Films [81]
I. Ashmanis, V. Kozlov and E. Yadin, J/S Co. Sidrabe Corporation, Latvia.....419

Integration of Target Manufacturing in the Sputtering Plant [82]
P. Lippens, Innovative Sputtering Technology (I.S.T.) N.V., Belgium.....424

Mixed Composition Materials Suitable for Vacuum Web Sputter Coating [83]
B.A. Banks, S.K. Rutledge and J.A. Dever, NASA Lewis Research Center; P.D. Hambourger,
P. Walters and E.J. Bruckner, Cleveland State University.....431

Scale-Up of a Nitrogen Glow-Discharge Process for Silver-PET Adhesion [84]
J.M. Grace, D.R. Freeman, R. Corts and W. Kosel, Eastman Kodak Company.....436

Methods of Monitoring & Control of Reactive ITO Deposition Process on Flexible Substrates with DC Sputtering [85]
H. Patel, M. Saif and H. Memarian, Courtaulds Perfomance Films.....441

Hollow-Cathode Activated EB Evaporation for Oxide Coating of Plastic Films [86]
M. Neumann, H. Morgner and S. Straach, Fraunhofer-Insitut für Elektronenstrahl-und
Plasmatechnik, Germany.....446

Ion Assisted Deposition of TiO₂ on Moving Web Using Oxygen Ions [87]
N.A.G. Ahmed, P. Atherford, D. Longdon and J. Downs, General Vacuum Equipment Ltd.,
United Kingdom.....451