Innovators Showcase and Live Product Demonstrations
2008 51st SVC Annual Technical Conference
April 19-24, 2008
Hyatt Regency Chicago on the River Walk, Chicago IL
Technical Program
April 19–24, 2008
Tuesday Morning, April 22
Innovators Showcase
The Innovators Showcase presentations will be presented in the Exhibit Hall starting at 10:30 a.m. when the Exhibit opens.
Moderator: Frank Zimone, Reactive NanoTechnologies, Inc.
10:30 a.m. IS-1 Reduction of Arc Energy by Retracting Energy Stored in Lead Inductance
R. Bugyi, A. Klimczak, and P. Ozimek, HUETTINGER Electronic Sp. z o.o., Zielonka, Poland
10:40 a.m. IS-2 Influence of the Voltage Rise Time on High Power Pulse Magnetron Discharge
R. Chistyakov, Zond Inc. / Zpulser LLC, Mansfield, MA
10:50 a.m. IS-3 P+ - Hard Material Coating Technology - an Effective Process for Deposition of Films with Improved Properties
M. Falz, M. Holzherr, and T. Schmidt, VTD Vakuumtechnik Dresden GmbH, Dresden, Germany
11:00 a.m. IS-4 Benchtop TOF-SIMS for Thin Films Analysis
N. Long, Millbrook Instruments, Ltd., Blackburn, United Kingdom
11:10 a.m. IS-5 Production Benefits of Bonding Sputter Targets Using Reactive Foils
M.P. O’Neill, Reactive Nanotechnologies, Inc., Hunt Valley, PA
11:20 a.m. IS-6 Optimizing Sputter Target Erosion Efficiency via 3D Magnetic and Plasma Simulations
M. Holik, V. Bellido, and D. Monaghan, Gencoa, Liverpool, United Kingdom; and J. Bradley, University of Liverpool, Liverpool, United Kingdom
11:30 a.m. IS-7 Plasma Spectrometer Based Process Feedback and Conditioning System
D. Monaghan, V. Bellido, B. Daniel, and J. Counsel, Gencoa, Ltd., Liverpool, United Kingdom
11:40 a.m. IS-8 A Technical Walk-Through of New Temperature Controlled Capacitive Diaphragm Gauge Family
C. Berg, INFICON AG, Balzers, Principality of Liechtenstein
11:50 a.m. IS-9 Innovative Small Dry Pump for Vacuum Applications
K. Caldwell, Varian, Inc., Lexington, MA
Tuesday Afternoon, April 22
Live Product Demonstrations by Vendors in the Exhibit Hall!
We have added Live Product Demonstrations to the program this year as a way to further enhance the visibility of exhibitors and provide a relaxed, hands-on forum for introducing new products or ideas to the attendees. Floor space has been reserved in the Exhibit Hall for Live Product Demonstrations.
N.X. Randall and J. Powell, CSM Instruments, Inc., Needham, MA
Instrumented nanoindentation is a widely used method for the analysis of thin films and coating systems. In this live demonstration, an exemplary nanoindentation study will be performed. Focus will be given to the relationship of results to basic theory, to provide understanding on the theoretical source and meaning of instrumented indentation results.
12:45 p.m. LP-2 Advances in Leak Detection of Process Systems
J. McLaren, Varian, Inc., Lexington, MA; and R. Hula, Varian, Inc., Barnhart, MO
Varian’s new VS Series Leak Detectors combine the simplicity of two-button operation with advanced expert system intelligence, providing powerful capability and enabling a broad range of test methods for specific applications. Robust design innovations allow the VS series to conform to rigorous industrial standards and operate dependably in the most challenging environments. Leaks in large systems often occur far from the leak detector. Wired remote controls have sought to address this problem, but impedance and the cumbersome nature of long cables are often limiting factors. For many applications these traditional wired remotes provide little benefit. Varian now offers Wireless Remote Control of its industry leading VS Leak Detectors. By utilizing modern wireless technology, leak testing hard-to-reach locations is now much easier, and can be performed at much greater distances of up to 100 meters. Applications in large systems in which two technicians were previously required now may be performed by one technician, thereby reducing labor costs. All the major functions of the leak detector are now at your fingertips, giving you a truly portable leak detection solution.
1:20 p.m. LP-3 Demonstration of Bonding Sputter Targets Using Reactive Foils
M.P. O’Neill, Reactive Nanotechnologies, Inc., Hunt Valley, PA
NanoBond™ is a process used to bond sputter targets to improve the quality, performance, or cost in use of the overall vacuum deposition process. The unique feature of the NanoBond™ process is the ability to bond without using any oven or furnace. Since the bonding is performed at room temperature, targets and backing plates can easily be staged for bonded. Real sputter targets will be bonded to demonstrate the simplicity of this process.
Tuesday Afternoon, April 22
Innovators Showcase
Moderator: Frank Zimone, Reactive NanoTechnologies, Inc.
2:00 p.m. IS-10 HPPMS and Oxide Technology Integrated Into a Most Versatile PVD Sputtering
C. Schiffers, and R. Cremer, CemeCon AG, Wuerselen, Germany
2:10 p.m. IS-11 PROVAC PRO500 Evaporation System Precise Lift-off Metalization
M. Kessler, Provac AG, Balzers, Principality of Liechtenstein; and D. Gary, Provac AG-Ricmar Sales & Service, Aptos, CA
2:20 p.m. IS-12 Laser and Camera Inspection Technologies for Solar PV Media
T. Potts, Dark Field Technologies, Inc., Orange, CT; and J.F. Borges, I2S Inc., Orange, CT
2:30 p.m. IS-13 The State-of-the-Art in Scratch Testing
E. Belo and N. Randall, CSM Instruments, Inc., Needham, MA
2:40 p.m. IS-14 Corrosion Properties of Diamond-Like Carbon Films Deposited Using a Novel PACVD Internal Coating Method
B. Boardman, A. Tudhope, D. Upadhyaya, T. Casserly, M. Gupta, and K. Boinapally, Sub-One Technology, Inc., Pleasanton, CA