We seem to have to replace the ion source very often (every 4 wks). I was wondering if this is a normal life time or should I be looking at other factor in my process.

Hi Rudy, what kind of ion source is it? If its a linear ion source with a metal based anode / cathode then they can sputter quickly. We use a carbon based anode and cathode that sputters at a low rate as the sputter yield of carbon is so low compared to metals. This gives a very long life-time. Dermot.